Thermopile-based flow sensing apparatus with electrostatic protection

A method for manufacturing an apparatus for sensing a flow of fluid, comprising:

• providing a membrane structure defining a heated area;
• disposing a heating structure over the membrane structure, wherein the heating structure has a centerline;
• disposing a plurality of first thermocouples, a plurality of second thermocouples, a plurality of third thermocouples, a plurality of fourth thermocouples, a plurality of fifth thermocouples, and a plurality of sixth thermocouples, comprising:
• disposing a first thermopile upstream of the centerline, wherein the first thermopile includes the plurality of first thermocouples, the plurality of third thermocouples, and the plurality of fourth thermocouples disposed upstream of the centerline, wherein at least a portion of the plurality of first thermocouples are disposed over the membrane structure, and at least one junction of the plurality of first thermocouples has rounded corners, wherein a distance between the plurality of third thermocouples and the plurality of first thermocouples ranges from 3 micrometers to 7 micrometers, and wherein a distance between the plurality of third thermocouples and the plurality of fourth thermocouples ranges from 4 micrometers to 8 micrometers;
• and
• disposing a second thermopile disposed downstream of the centerline, wherein the second thermopile includes the plurality of second thermocouples, the plurality of fifth thermocouples, and the plurality of sixth thermocouples disposed downstream of the centerline, wherein at least a portion of the plurality of second thermocouples are disposed over the membrane structure, and at least one junction of the plurality of second thermocouples has rounded corners, wherein a distance between the plurality of fifth thermocouples and the plurality of second thermocouples ranges from 3 micrometers to 7 micrometers, and wherein a distance between the plurality of fifth thermocouples and the plurality of sixth thermocouples ranges from 4 micrometers to 8 micrometers.