Apparatus and method of measuring air currents on surface of substrate

An apparatus for measuring air currents on a surface of a substrate, comprising:

• a first air current measurement module measuring a magnitude of air currents on a surface of a first substrate, which is processed in accordance with a semiconductor manufacturing process;
• a second air current measurement module measuring a movement direction of the air currents;
• and
• a power module supplying power to the first and second air current measurement modules,
• wherein
• the apparatus further comprises at least one of a memory module, which stores measurement results regarding the air currents, and a communication module, which transmits the measurement results regarding the air currents to outside,
• the first air current measurement module, the second air current measurement module, the power module, the memory module, and the communication module are mounted on a second substrate, which has the same shape as the first substrate,
• the second air current measurement module calculates the movement direction of the air currents using multiple first air current measurement modules,
• the first air current measurement module is disposed at a top of the second substrate,
• the second air current measurement module, the power module, the memory module, and the communication module are disposed at a bottom of the second substrate,
• the first air current measurement module is a thermal transducer,
• the first air current measurement module is formed on a surface of the second substrate as a thin film pattern or as a micro-electro mechanical system (MEMS) pattern,
• the first air current measurement module is disposed in a hole formed in the second substrate,
• the second air current measurement module, the power module, the memory module, and the communication module are embedded at the bottom of the second substrate or are installed on a third substrate, which is coupled to the bottom of the second substrate, and
• the apparatus is fastened within a first substrate processing device performing a cleaning process on the first substrate or within a second substrate processing device performing a heat treatment process on the first substrate, using multiple edge rings, which are installed at the bottom of the second substrate.

A method of measuring air currents on a surface of a substrate, comprising:

• placing an apparatus for measuring air currents on a surface of a substrate at a location where a first substrate is positioned within a substrate processing device, which processes the first substrate in accordance with a semiconductor manufacturing process;
• operating the apparatus and creating the same environment as when processing the first substrate within the substrate processing device;
• measuring a magnitude and movement direction of air currents using the apparatus;
• storing measurement results regarding the air currents;
• and
• transmitting the measurement results regarding the air currents to a designated terminal,
• wherein the apparatus is installed on a second substrate, which has the same shape as the first substrate.