C23F 1/02

Local etching

C23F1/02 (Local etching) appears on 1,128 US grants and 1,057 published applications in this corpus.

Search patents in C23F
Granted patents
1,128
Published applications
1,057
Assignees
603
Inventors
2,540
Latest grant
1 Sep 2026

Filings by year

C23F 1/02: granted patents and published applications per publication year
YearGranted patentsPublished applications
197650
197790
197870
197980
198090
198190
1982120
1983100
198490
198580
1986140
1987130
198890
1989120
1990140
1991190
199290
1993170
1994200
1995150
199690
1997130
1998150
199990
2000170
20011612
20022222
20032520
20041443
20051820
20062534
20071026
20081728
20091921
20102426
20112439
20121541
20133751
20143949
20155693
20165757
20175054
20184365
20195560
20204761
20215062
20224752
20234139
20244326
20253530
2026826

By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.

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By later US patents