C23C 16/485
Using synchrotron radiation
Official title: {using synchrotron radiation}
C23C16/485 (Using synchrotron radiation) appears on 5 US grants and 2 published applications in this corpus.
Search patents in C23C- Granted patents
- 5
- Published applications
- 2
- Assignees
- 3
- Inventors
- 7
- Latest grant
- 21 Oct 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 0 | 0 |
| 2012 | 0 | 0 |
| 2013 | 0 | 0 |
| 2014 | 0 | 0 |
| 2015 | 0 | 0 |
| 2016 | 0 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 0 |
| 2019 | 0 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 1 |
| 2024 | 1 | 1 |
| 2025 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Methods and apparatus for heating a liquid21 Oct 2025US 12,449,084 B2ASM IP Holding B. V.
- Methods and apparatus for heating a liquid21 May 2024US 11,988,316 B2ASM IP Holding B. V.
- Production method for a semiconductor device2 Jan 2001US 6,169,004 AMatsushita Electric Industrial Co., Ltd.
- Production method for a semiconductor device6 Oct 1998US 5,817,559 AMatsushita Electric Industrial Co., Ltd.
- Method for producing high quality thin layer films on substrates26 Apr 1994US 5,306,530 AAssociated Universities, Inc.
Most cited
By later US patents
- Method for producing high quality thin layer films on substrates249US 5,306,530 AAssociated Universities, Inc. · 1994
- Production method for a semiconductor device4US 5,817,559 AMatsushita Electric Industrial Co., Ltd. · 1998
- Production method for a semiconductor device4US 6,169,004 AMatsushita Electric Industrial Co., Ltd. · 2001
- Methods and apparatus for heating a liquid1US 11,988,316 B2ASM IP Holding B. V. · 2024