Method for producing high quality thin layer films on substrates
AssigneeAssociated Universities, Inc.
InventorsMyron Strongin, Mark Ruckman, Daniel Strongin
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Abstract
A method for producing high quality, thin layer films of inorganic compounds upon the surface of a substrate is disclosed. The method involves condensing a mixture of preselected molecular precursors on the surface of a substrate and subsequently inducing the formation of reactive species using high energy photon or charged particle irradiation. The reactive species react with one another to produce a film of the desired compound upon the surface of the substrate.
Claims12
A method for selectively providing a highly pure, thin layer film of a compound on the surface of a temperature sensitive substrate, said method comprising:
- condensing at least a first and a second molecular precursor on the surface of said substrate under cryosorption conditions suitable for condensation, each of said precursors being capable of rendering volatile reactive species at the substrate surface upon irradiation;
- and
- directing an irradiating beam at said precursors under conditions suitable for formation of at least a first and a second reactive species corresponding to said first and second precursors, respectively,
- whereby said first and second species react to form said compound upon the surface of said substrate.
Dependencies are inferred from the claim text.