C23C 16/4415
Acoustic wave cvd
Official title: {Acoustic wave CVD}
C23C16/4415 (Acoustic wave cvd) appears on 12 US grants and 13 published applications in this corpus.
Search patents in C23C- Granted patents
- 12
- Published applications
- 13
- Assignees
- 16
- Inventors
- 37
- Latest grant
- 27 Jul 2021
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 1 | 0 |
| 1997 | 0 | 0 |
| 1998 | 1 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 2 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 1 | 1 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 2 |
| 2011 | 0 | 1 |
| 2012 | 0 | 0 |
| 2013 | 2 | 1 |
| 2014 | 0 | 1 |
| 2015 | 0 | 0 |
| 2016 | 1 | 2 |
| 2017 | 1 | 0 |
| 2018 | 1 | 2 |
| 2019 | 0 | 1 |
| 2020 | 0 | 0 |
| 2021 | 1 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 0 |
| 2024 | 0 | 1 |
| 2025 | 0 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
- Surface mechanical attrition treatment (SMAT) methods and systems for modifying nanostructures27 Jul 2021US 11,072,867 B2City University of Hong Kong
- Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same17 Apr 2018US 9,945,032 B2The Aerospace Corporation
- Surface mechanical attrition treatment (SMAT) methods and systems for modifying nanostructures7 Nov 2017US 9,809,893 B2City University of Hong Kong
- Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same5 Apr 2016US 9,303,309 B2The Aerospace Corporation
- Enhancing plasma surface modification using high intensity and high power ultrasonic acoustic waves19 Mar 2013US 8,399,795 B2Force Technology
- Ultrasonic Assisted Decomposition System2 Oct 2025US 2025/0305130 A1APPLIED Materials.Inc.
- Acoustic wave assisted chemical vapor iinfiltration2 May 2024US 2024/0141479 A1Rtx Corporation
- Mist coating forming apparatus and mist coating forming method11 Jul 2019US 2019/0210060 A1Toshiba Mitsubishi-Electric Industrial Systems Corporation
- Enhancing gas-phase reaction in a plasma using high intensity and high power ultrasonic acoustic waves3 May 2018US 2018/0122622 A1Force Technology
- Surface mechanical attrition treatment (smat) methods and systems for modifying nanostructures1 Feb 2018US 2018/0030609 A1City University of Hong Kong
Most cited
By later US patents
- Plasma processing apparatus for controlling plasma constituents using neutral and plasma sound waves35US 5,350,454 AGeneral Atomics · 1994
- Film formation apparatus and method for forming a film26US 5,569,502 ASemiconductor Energy Laboratory Co.Ltd. · 1996
- Method and apparatus for preparing crystal thin films by using a surface acoustic wave10US 5,837,332 AKabushiki Kaisha Hitachi Seisakusho · 1998
- Systems and methods for enhancing mobility of atomic or molecular species on a substrate at reduced bulk temperature using acoustic waves, and structures formed using same7US 9,303,309 B2The Aerospace Corporation · 2016
- Method of fabrication of fibers, textiles and composite materials6US 8,361,566 B2Los Alamos National Security, LLC · 2013