B01D 2257/2066
Fluorine
B01D2257/2066 (Fluorine) appears on 196 US grants and 281 published applications in this corpus.
Search patents in B01D- Granted patents
- 196
- Published applications
- 281
- Assignees
- 166
- Inventors
- 697
- Latest grant
- 21 Jul 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 2 | 0 |
| 1979 | 0 | 0 |
| 1980 | 0 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 2 | 0 |
| 1993 | 0 | 0 |
| 1994 | 0 | 0 |
| 1995 | 2 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 3 | 0 |
| 1999 | 5 | 0 |
| 2000 | 2 | 0 |
| 2001 | 7 | 3 |
| 2002 | 10 | 5 |
| 2003 | 7 | 7 |
| 2004 | 5 | 3 |
| 2005 | 5 | 12 |
| 2006 | 3 | 5 |
| 2007 | 6 | 7 |
| 2008 | 2 | 13 |
| 2009 | 6 | 14 |
| 2010 | 3 | 9 |
| 2011 | 7 | 5 |
| 2012 | 6 | 7 |
| 2013 | 4 | 6 |
| 2014 | 4 | 6 |
| 2015 | 9 | 17 |
| 2016 | 10 | 12 |
| 2017 | 9 | 16 |
| 2018 | 11 | 10 |
| 2019 | 13 | 11 |
| 2020 | 9 | 15 |
| 2021 | 5 | 6 |
| 2022 | 6 | 19 |
| 2023 | 4 | 11 |
| 2024 | 11 | 18 |
| 2025 | 10 | 22 |
| 2026 | 6 | 22 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- High efficiency trap for particle collection in a vacuum foreline21 Jul 2026US 12,689,010 B2APPLIED Materials.Inc.
- Catalyst for decomposing perfluorinated compounds and method of manufacturing the catalyst16 Jun 2026US 12,654,155 B2Korea Advanced Institute of Science and Technology
- Gas treatment system, semiconductor process system including the same, and gas treatment method using the same26 May 2026US 12,636,612 B2Samsung Electronics Co., Ltd.
- Waste gas treatment apparatus for semiconductor and display processes14 Apr 2026US 12,604,697 B2
- Porous metal organic framework-polymer composites for use in detoxifying chemical warfare agents3 Mar 2026US 12,564,830 B2Research Triangle Institute
- Gas processing device and gas production method8 Oct 2026US 2026/0307003 A1Hirata Corporation
- System for processing gas and method for processing gas using the same17 Sep 2026US 2026/0273460 A1Research & Business Foundation Sungkyunkwan University
- Multi-step defluorination of mixtures of fluorinated compounds10 Sep 2026US 2026/0265162 A1International Business Machines Corporation
- Method, device and system for destroying one or more pollutant3 Sep 2026US 2026/0257169 A1
- Catalyst for decomposing perfluorocompounds27 Aug 2026US 2026/0249272 A1Ecoprohn
Most cited
By later US patents
- Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases210US 6,423,284 B1Advanced Technology Materials, Inc. · 2002
- Organic amine impregnated activated carbon91US 5,462,908 AHer Majesty the Queen in right of Canada, as represented by the Minister of National Defence · 1995
- Adsorption process for continuous purification of high value gas feeds84US 7,166,149 B2Uop LLC · 2007
- Porous ceramic liner for a plasma source82US 6,367,412 B1APPLIED Materials.Inc. · 2002
- Removal of perfluorocarbons from gas streams77US 5,417,742 AThe BOC Group, Inc. · 1995