Y10S 977/891
Vapor phase deposition
Y10S977/891 (Vapor phase deposition) appears on 207 US grants and 165 published applications in this corpus.
Search patents in Y10S- Granted patents
- 207
- Published applications
- 165
- Assignees
- 142
- Inventors
- 487
- Latest grant
- 24 Jun 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1995 | 1 | 0 |
| 1996 | 3 | 0 |
| 1997 | 5 | 0 |
| 1998 | 7 | 0 |
| 1999 | 9 | 0 |
| 2000 | 9 | 0 |
| 2001 | 10 | 4 |
| 2002 | 14 | 10 |
| 2003 | 14 | 7 |
| 2004 | 5 | 7 |
| 2005 | 4 | 8 |
| 2006 | 4 | 8 |
| 2007 | 6 | 11 |
| 2008 | 10 | 14 |
| 2009 | 5 | 13 |
| 2010 | 16 | 10 |
| 2011 | 13 | 5 |
| 2012 | 12 | 9 |
| 2013 | 4 | 10 |
| 2014 | 10 | 4 |
| 2015 | 10 | 8 |
| 2016 | 2 | 5 |
| 2017 | 2 | 12 |
| 2018 | 6 | 7 |
| 2019 | 8 | 9 |
| 2020 | 8 | 2 |
| 2021 | 4 | 1 |
| 2022 | 3 | 0 |
| 2023 | 1 | 1 |
| 2024 | 1 | 0 |
| 2025 | 1 | 0 |
By publication year. Applications have been published since 2001.
Recent patents
- Iron nanoparticles and methods of production24 Jun 2025US 12,337,301 B2University of New Hampshire
- Metal-carbon-nanotube metal matrix composites for metal contacts on photovoltaic cells27 Aug 2024US 12,074,228 B2UNM Rainforest Innovations
- Continuous boron nitride nanotube fibers11 Apr 2023US 11,623,865 B2Bnnt, LLC
- Metal matrix composites for contacts on solar cells28 Jun 2022US 11,374,133 B2UNM Rainforest Innovations
- Wafer-scale integration of dopant atoms for donor- or acceptor-based spin qubits7 Jun 2022US 11,355,623 B2Intel Corporation
- Metal-carbon-nanotube metal matrix composites for metal contacts on photovoltaic cells23 Mar 2023US 2023/0091494 A1UNM Rainforest Innovations
- Iron nanoparticles and methods of production15 Jul 2021US 2021/0213427 A1University of New Hampshire
- Continuous boron nitride nanotube fibers3 Sep 2020US 2020/0277188 A1Bnnt, LLC
- Self-assembly of nanostructures19 Mar 2020US 2020/0091433 A1International Business Machines Corporation
- Method of making co3o4 nanorods for electrocatalytic water splitting12 Dec 2019US 2019/0376195 A1King Fahd University of Petroleum and Minerals
Most cited
By later US patents
- Methods for making a dielectric stack in an integrated circuit247US 6,660,660 B2ASM International N.V. · 2003
- Atomic layer deposited nanolaminates of HfO2/ZrO2 films as gate dielectrics230US 6,921,702 B2Micron Technology, Inc. · 2005
- Carbon fibers and method for their production207US 5,424,054 AInternational Business Machines Corporation · 1995
- Electrical conductors formed from mixtures of metal powders and metallo-organic decompositions compounds195US 5,882,722 APartnerships Limited, Inc. · 1999
- Mass synthesis method of high purity carbon nanotubes vertically aligned over large-size substrate using thermal chemical vapor deposition186US 6,350,488 B1Iljin Nanotech Co., Ltd. · 2002