Back to results
US 6,350,488 B1Granted
Mass synthesis method of high purity carbon nanotubes vertically aligned over large-size substrate using thermal chemical vapor deposition
AssigneeIljin Nanotech Co., Ltd.
InventorsCheol-jin Lee, Jae-eun Yoo
Life of this patent
Estimating the term…
Abstract
A method of synthesizing high purity carbon nanotubes vertically aligned over a large size substrate by thermal chemical vapor deposition (CVD). In the synthesis method, isolated nano-sized catalytic metal particles are formed over a substrate by etching, and purified carbon nanotubes are grown vertically aligned, from the catalytic metal particles by thermal CVD using a carbon source gas.
Claims18
A method of synthesizing carbon nanotubes, comprising:
- forming a metal catalyst layer over a substrate;
- etching the metal catalyst layer to form isolated nano-sized catalytic metal particles evenly distributed over an area of said substrate on which said metal catalyst layer was formed;
- and
- growing carbon nanotubes from said isolated nano-sized catalytic metal particles by thermal chemical vapor deposition (CVD) in which a carbon source gas is supplied to a thermal CVD apparatus to form carbon nanotubes vertically aligned over the substrate.
1 more element
Dependencies are inferred from the claim text.