H03H 2009/02511
Vertical, i.e. perpendicular to the substrate plane
Official title: {Vertical, i.e. perpendicular to the substrate plane}
H03H2009/02511 (Vertical, i.e. perpendicular to the substrate plane) appears on 125 US grants and 130 published applications in this corpus.
Search patents in H03H- Granted patents
- 125
- Published applications
- 130
- Assignees
- 52
- Inventors
- 204
- Latest grant
- 11 Aug 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1988 | 1 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 0 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 2 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 1 | 6 |
| 2002 | 6 | 7 |
| 2003 | 6 | 8 |
| 2004 | 9 | 10 |
| 2005 | 6 | 8 |
| 2006 | 8 | 15 |
| 2007 | 10 | 16 |
| 2008 | 8 | 9 |
| 2009 | 10 | 7 |
| 2010 | 6 | 4 |
| 2011 | 15 | 6 |
| 2012 | 7 | 10 |
| 2013 | 4 | 4 |
| 2014 | 7 | 3 |
| 2015 | 4 | 1 |
| 2016 | 2 | 2 |
| 2017 | 0 | 1 |
| 2018 | 0 | 1 |
| 2019 | 3 | 0 |
| 2020 | 2 | 1 |
| 2021 | 0 | 0 |
| 2022 | 0 | 1 |
| 2023 | 2 | 4 |
| 2024 | 0 | 3 |
| 2025 | 3 | 3 |
| 2026 | 1 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
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- Resonator and Method of Forming the Same11 Jul 2024US 2024/0235522 A9Agency for Science, Technology and Research
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Most cited
By later US patents
- Pattern-aligned carbon nanotube growth and tunable resonator apparatus261US 6,803,840 B2California Institute of Technology · 2004
- Method and apparatus for generating a signal having at least one desired output frequency utilizing a bank of vibrating micromechanical devices115US 6,577,040 B2The Regents of the University of Michigan · 2003
- Parametric resonance in microelectromechanical structures113US 6,497,141 B1Cornell Research Foundation, Inc. · 2002
- Vacuum-cavity MEMS resonator109US 6,808,954 B2Intel Corporation · 2004
- Polysilicon resonating beam transducers106US 5,090,254 AWisconsin Alumni Research Foundation · 1992