Micro-mechanical resonator having out-of-phase and out-of-plane flexural mode resonator portions

An apparatus, comprising:

• a die including a cavity;
• an anchor coupled to the die;
• a first resonator coupled to the die and suspended over the cavity, the first resonator coupled to a side of the anchor, and the first resonator operable to bend towards or away from a bottom of the cavity;
• and
• a second resonator coupled to the side of the anchor and suspended over the cavity, at least a part of the first resonator being laterally between the side of the anchor and a part of the first resonator, and the second resonator operable to bend towards or away from the bottom of the cavity.

An apparatus comprising:

• a die having a cavity;
• an anchor coupled to the die;
• first, second, third, and fourth piezoelectric beams each coupled to a side of the anchor and suspended over the cavity;
• a first mass portion suspended over the cavity and coupled between the first and second piezoelectric beams;
• and
• a second mass portion suspended over the cavity and coupled to the third and fourth piezoelectric beams, the second mass portion, at least one of the first piezoelectric beam, the second piezoelectric beam, or the first mass portion being laterally between the side of the anchor and the second mass portion.