H01S 3/073
Gas lasers comprising separate discharge sections in one cavity
Official title: {Gas lasers comprising separate discharge sections in one cavity, e.g. hybrid lasers (tandem arrangements of separate gas lasers H01S3/2366)}
H01S3/073 (Gas lasers comprising separate discharge sections in one cavity) appears on 221 US grants and 112 published applications in this corpus.
Search patents in H01S- Granted patents
- 221
- Published applications
- 112
- Assignees
- 100
- Inventors
- 396
- Latest grant
- 10 Feb 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 3 | 0 |
| 1977 | 3 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 3 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 2 | 0 |
| 1984 | 7 | 0 |
| 1985 | 6 | 0 |
| 1986 | 4 | 0 |
| 1987 | 13 | 0 |
| 1988 | 3 | 0 |
| 1989 | 11 | 0 |
| 1990 | 5 | 0 |
| 1991 | 10 | 0 |
| 1992 | 11 | 0 |
| 1993 | 3 | 0 |
| 1994 | 5 | 0 |
| 1995 | 5 | 0 |
| 1996 | 2 | 0 |
| 1997 | 6 | 0 |
| 1998 | 5 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 8 | 2 |
| 2002 | 3 | 0 |
| 2003 | 6 | 1 |
| 2004 | 3 | 5 |
| 2005 | 3 | 8 |
| 2006 | 4 | 5 |
| 2007 | 3 | 5 |
| 2008 | 5 | 8 |
| 2009 | 5 | 4 |
| 2010 | 3 | 2 |
| 2011 | 6 | 7 |
| 2012 | 5 | 5 |
| 2013 | 1 | 4 |
| 2014 | 9 | 20 |
| 2015 | 11 | 6 |
| 2016 | 8 | 7 |
| 2017 | 11 | 4 |
| 2018 | 1 | 2 |
| 2019 | 5 | 2 |
| 2020 | 1 | 2 |
| 2021 | 3 | 4 |
| 2022 | 2 | 1 |
| 2023 | 3 | 2 |
| 2024 | 2 | 1 |
| 2025 | 0 | 2 |
| 2026 | 1 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Gaseous laser systems with edge-defining element and related techniques10 Feb 2026US 12,548,968 B2Xemed LLC
- Laser apparatus and laser machining apparatus16 Apr 2024US 11,958,128 B2Mitsubishi Electric Corporation
- Folded slab laser26 Mar 2024US 11,942,753 B2Kern Technologies, LLC
- Radio-frequency excited gas laser19 Dec 2023US 11,848,530 B2Coherent, Inc.
- Spectral feature selection and pulse timing control of a pulsed light beam26 Sep 2023US 11,768,438 B2Cymer, Inc.
- Optical amplifier11 Jun 2026US 2026/0163328 A1ASML Netherlands B. V.
- Laser chamber and electronic device manufacturing method4 Jun 2026US 2026/0155616 A1Gigaphoton Inc.
- Laser apparatus and method for manufacturing electronic device9 Apr 2026US 2026/0100553 A1Gigaphoton Inc.
- Gas laser device and electronic device manufacturing method20 Nov 2025US 2025/0357715 A1Gigaphoton Inc.
- Gaseous laser systems with edge-defining element and related techniques29 May 2025US 2025/0174957 A1Xemed LLC
Most cited
By later US patents
- Laser apparatus76US 7,257,136 B2Fanuc Corporation · 2007
- High power waveguide laser72US 6,788,722 B1Coherent, Inc. · 2004
- Drive laser delivery systems for EUV light source61US 7,491,954 B2Cymer, Inc. · 2009
- Fast axial flow laser circulating system59US 4,891,820 ARofin-Sinar, Inc. · 1990
- Micro-laser57US 6,597,721 B1UT-Battelle, LLC · 2003