Laser apparatus and method for manufacturing electronic device

A method for manufacturing an electronic device, the method comprising:

• generating a laser beam with a laser apparatus, the laser apparatus including
• a first optical resonator including a first rear mirror and a first output coupling mirror, and
• a first laser chamber filled with a laser gas and including
• a pair of first discharge electrodes forming a discharge space where a first light beam that reciprocates in the first optical resonator passes through,
• a first cross-flow fan configured to circulate the laser gas in the first laser chamber,
• a first rectifying guide configured to direct the laser gas in the first laser chamber between the first discharge electrodes, and
• a pair of first windows positioned in an optical path of the first light beam,
• the first laser chamber being tilted in a longitudinal direction of a cross section of the first light beam relative to a first optical axis defined by the first optical resonator;
• outputting the laser beam to an exposure apparatus;
• and
• exposing a photosensitive substrate to the laser beam in the exposure apparatus to manufacture the electronic device.