Gas laser device and electronic device manufacturing method

An electronic device manufacturing method, comprising:

• generating pulse laser light using a gas laser device;
• outputting the pulse laser light to an exposure apparatus;
• and
• exposing a photosensitive substrate to the pulse laser light in the exposure apparatus to manufacture an electronic device,
• the gas laser device being configured to amplify, using an amplifier, laser light output from a laser oscillator and output the laser light,
• the amplifier including:
• a chamber device including a pair of discharge electrodes facing each other and arranged at an internal space thereof through which the laser light from the laser oscillator passes and in which a laser gas is filled, and being configured to amplify the laser light from the laser oscillator by a voltage being applied between the pair of discharge electrodes;
• a resonator configured to cause the laser light output from the chamber device to resonate between both sides sandwiching the chamber device;
• and
• a beam expander,
• the resonator including an output coupling mirror arranged on one side of the sides sandwiching the chamber device, and being configured to cause a part of the laser light output from the chamber device to be transmitted therethrough, and another part of the laser light output from the chamber device to be reflected back into the chamber device, and
• the beam expander being arranged between the chamber device and the output coupling mirror, and including a convex mirror configured to reflect the laser light output from the chamber device to expand a beam width of the laser light, and a concave mirror configured to reflect the laser light reflected by the convex mirror toward the output coupling mirror to collimate the laser light so that the expanded beam width of the laser light becomes constant.