Optical amplifier
AssigneesASML Netherlands B.V., TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
InventorsAlexander Matthijs STRUYCKEN, Joachim SCHULZ, Steffen Alfred ERHARD
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Abstract
An optical amplifier configured to amplify a laser beam, the optical amplifier comprising: an optical path of the laser beam, the optical path comprising a first part and a second part and a reflector configured to reflect the laser beam so as to direct the laser beam between the first and second parts of the optical path, the reflector being configured to reflect the laser beam such that the laser beam reflected by the reflector is parallel to the laser beam incident on the reflector.
Claims16
1-15. (canceled)
An optical amplifier configured to amplify a laser beam, the optical amplifier comprising:
- an optical path of the laser beam, the optical path comprising a first part and a second part;
- and
- a reflector configured to reflect the laser beam so as to direct the laser beam between the first and second parts of the optical path, the reflector being configured to reflect the laser beam such that the laser beam reflected by the reflector is parallel to the laser beam incident on the reflector.
Dependencies are inferred from the claim text.