H01J 3/029
Schematic arrangements for beam forming
Official title: {Schematic arrangements for beam forming}
H01J3/029 (Schematic arrangements for beam forming) appears on 46 US grants and 27 published applications in this corpus.
Search patents in H01J- Granted patents
- 46
- Published applications
- 27
- Assignees
- 32
- Inventors
- 104
- Latest grant
- 15 Jul 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 4 | 0 |
| 1977 | 1 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 2 | 0 |
| 1981 | 1 | 0 |
| 1982 | 1 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 2 | 0 |
| 1986 | 1 | 0 |
| 1987 | 0 | 0 |
| 1988 | 0 | 0 |
| 1989 | 0 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 2 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 4 | 0 |
| 2000 | 1 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 1 |
| 2003 | 1 | 3 |
| 2004 | 2 | 2 |
| 2005 | 2 | 1 |
| 2006 | 1 | 1 |
| 2007 | 0 | 1 |
| 2008 | 0 | 0 |
| 2009 | 0 | 0 |
| 2010 | 0 | 1 |
| 2011 | 0 | 0 |
| 2012 | 1 | 0 |
| 2013 | 1 | 1 |
| 2014 | 2 | 2 |
| 2015 | 1 | 2 |
| 2016 | 2 | 1 |
| 2017 | 0 | 2 |
| 2018 | 0 | 0 |
| 2019 | 2 | 2 |
| 2020 | 2 | 2 |
| 2021 | 2 | 0 |
| 2022 | 1 | 1 |
| 2023 | 1 | 2 |
| 2024 | 0 | 1 |
| 2025 | 4 | 1 |
By publication year. Applications have been published since 2001.
Recent patents
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- Charged particle source module29 Apr 2025US 12,288,663 B2ASML Netherlands B. V.
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- Charged particle source module17 Jan 2023US 11,557,455 B2ASML Netherlands B. V.
- Electron gun17 Jul 2025US 2025/0232940 A1Shanghai United Imaging Healthcare Co., Ltd.
- Electron gun4 Jan 2024US 2024/0006142 A1Shanghai United Imaging Healthcare Co., Ltd.
- Charged particle source module18 May 2023US 2023/0154719 A1ASML Netherlands B. V.
- Particle beam device, method for operating the particle beam device and computer program product2 Mar 2023US 2023/0065373 A1Carl Zeiss Microscopy GmbH
- Electron beam application device, and electron beam emission method for electron beam application device23 Jun 2022US 2022/0199350 A1Photo electron Soul Inc.
Most cited
By later US patents
- X-ray tomography method and apparatus used in conjunction with a charged particle cancer therapy system62US 8,144,832 B22012
- Gun lens for generating a particle beam14US 5,895,919 AAdvantest Corporation · 1999
- Method of and apparatus for generating uniform elongated electron beam with the aid of multiple filaments12US 5,126,633 AEnergy Sciences Inc. · 1992
- Non-planar extractor structure for electron source12US 8,513,619 B1KLA-Tencor Corporation · 2013
- Rectangular beam laminar flow electron gun10US 3,980,919 AWatkins-Johnson Company · 1976