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US 5,895,919 AGranted
Gun lens for generating a particle beam
AssigneeAdvantest Corporation
InventorsJurgen Frosien, Stefan Lanio, Gerald Schonecker
Life of this patent
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Abstract
The invention relates to a gun lens for generating a particle beam with a cathode, an extraction electrode, an anode and a condenser lens, wherein a deceleration field is generated between the extraction electrode and the anode and the condenser lens produces a magnetic field which is superimposed on both the cathode, the extraction electrode and the anode.
Claims15
Gun lens (1, 1', 1") for generating a particle beam with
- a cathode (2),
- an extraction electrode (3),
- an anode (4)
- and a condenser lens (5),
- characterised in that a deceleration field is generated between the extraction electrode (3) and the anode (4) and the condenser lens produces a magnetic field (6) which is superimposed on both the cathode (2), the extraction electrode (3) and the anode (4).
2 more elements
Particle beam device with
- a) a gun lens (1, 1', 1") for generating a particle beam with
- a1) a cathode (2),
- a2) an extraction electrode (3),
- a3) an anode (4)
- a4) and a condenser lens (5),
- b) a beam blanking system (9) for blanking the particle beam,
- characterised in that a deceleration field is generated between the extraction electrode (3) and the anode (4) and the condenser lens (5) produces a magnetic field which is superimposed on both the cathode (2), the extraction electrode (3) and the anode (4).
4 more elements
Dependencies are inferred from the claim text.