H01J 2237/041
Beam polarising means
H01J2237/041 (Beam polarising means) appears on 6 US grants and 7 published applications in this corpus.
Search patents in H01J- Granted patents
- 6
- Published applications
- 7
- Assignees
- 8
- Inventors
- 15
- Latest grant
- 28 Apr 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2008 | 0 | 1 |
| 2009 | 0 | 0 |
| 2010 | 0 | 0 |
| 2011 | 1 | 1 |
| 2012 | 1 | 0 |
| 2013 | 1 | 1 |
| 2014 | 0 | 1 |
| 2015 | 0 | 0 |
| 2016 | 1 | 0 |
| 2017 | 0 | 0 |
| 2018 | 0 | 1 |
| 2019 | 1 | 0 |
| 2020 | 0 | 0 |
| 2021 | 0 | 0 |
| 2022 | 0 | 0 |
| 2023 | 0 | 0 |
| 2024 | 0 | 0 |
| 2025 | 0 | 1 |
| 2026 | 1 | 1 |
By publication year. 2026 runs to 8 Oct.
Recent patents
- Substrate processing apparatus and a method of processing a substrate using the same28 Apr 2026US 12,614,702 B2Samsung Electronics Co., Ltd.
- Charged particle device, charged particle irradiation method, and analysis device27 Aug 2019US 10,395,885 B2Hitachi, Ltd.
- Spin rotation device11 Oct 2016US 9,466,454 B2Sanyu Denshi Co. Ltd.
- Phase-shifting element and particle beam device having a phase-shifting element7 May 2013US 8,436,302 B2Carl Zeiss Microscopy GmbH
- Phase-shifting element and particle beam device having a phase-shifting element8 May 2012US 8,173,963 B2Carl Zeizz NTS GmbH
- Substrate processing apparatus and a method of processing a substrate using the same23 Jul 2026US 2026/0213135 A1Samsung Electronics Co., Ltd.
- Substrate processing apparatus and a method of processing a substrate using the same27 Mar 2025US 2025/0104980 A1Samsung Electronics Co., Ltd.
- Charged particle device, charged particle irradiation method, and analysis device21 Jun 2018US 2018/0174795 A1Hitachi, Ltd.
- Spin rotation device17 Jul 2014US 2014/0197734 A1Sanyu Denshi Co. Ltd.
- Phase-shifting element and particle beam device having a phase-shifting element3 Jan 2013US 2013/0001445 A1Carl Zeiss Microscopy GmbH
Most cited
By later US patents
- Phase-shifting element and particle beam device having a phase-shifting element6US 7,902,506 B2Carl Zeiss NTS GmbH · 2011
- Phase-shifting element and particle beam device having a phase-shifting element3US 8,173,963 B2Carl Zeizz NTS GmbH · 2012
- Charged particle device, charged particle irradiation method, and analysis device1US 10,395,885 B2Hitachi, Ltd. · 2019
- Spin rotation device1US 9,466,454 B2Sanyu Denshi Co. Ltd. · 2016