Charged particle device, charged particle irradiation method, and analysis device

A charged particle irradiation method for irradiating a sample with charged particles having spins, the charged particle irradiation method comprising:

• generating an electric field and a magnetic field, each having a component perpendicular to trajectories of the charged particles and perpendicular to each other,
• wherein the magnetic field has a magnetic field gradient at a position of the trajectories of the charged particles,
• wherein the electric field is applied so as to weaken a Lorentz force received by the charged particles,
• wherein the magnetic field gradient gives the charged particles a change in the trajectories according to the spins thereof,
• wherein a flux of the emitted charged particles has a deviated distribution of the charged particles having upward spins and the charged particles having downward spins, and
• wherein the method further comprises increasing a spin polarization degree of the charged particle flux using a shielding section.

An analysis device, comprising:

• a charged particle source which generates charged particles;
• a sample table on which a sample is placed;
• and
• a transport optical system which is disposed between the charged particle source and the sample table and which is configured to transport the charged particles as charged particle flux to the sample,
• wherein the transport optical system comprises a separation optical system, an aperture and an objective lens, the separation optical system comprising
• a magnetic field generating section which generates a magnetic field having a perpendicular component to a course of the charged particle flux, the perpendicular component having a gradient;
• and
• an electric field generating section which generates an electric field having a perpendicular component to the course of the charged particle flux and the perpendicular component of the magnetic field,
• wherein the aperture increases a spin polarization degree of the charged particle flux by shielding a part of the charged particle flux passed through the separation optical system,
• wherein the objective lens converges the charged particle flux to irradiate the sample, wherein the analysis device further comprises
• a detector which observes particles reflected or generated from the sample by the irradiation;
• an enlarging optical system disposed between the separation optical system and the aperture and configured to enlarge a diameter of the charged particle flux by a static lens or spontaneous spreading of the charged particles;
• and
• a control optical system comprising at least one deflection electrode.