G06F 2115/04
Micro electro-mechanical systems [mems]
Official title: Micro electro-mechanical systems [MEMS]
G06F2115/04 (Micro electro-mechanical systems [mems]) appears on 67 US grants and 75 published applications in this corpus.
Search patents in G06F- Granted patents
- 67
- Published applications
- 75
- Assignees
- 10
- Inventors
- 55
- Latest grant
- 19 Jul 2022
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 2002 | 0 | 2 |
| 2003 | 0 | 0 |
| 2004 | 1 | 0 |
| 2005 | 0 | 2 |
| 2006 | 1 | 3 |
| 2007 | 2 | 0 |
| 2008 | 0 | 0 |
| 2009 | 1 | 1 |
| 2010 | 0 | 0 |
| 2011 | 0 | 9 |
| 2012 | 0 | 2 |
| 2013 | 2 | 4 |
| 2014 | 7 | 4 |
| 2015 | 6 | 2 |
| 2016 | 6 | 14 |
| 2017 | 6 | 5 |
| 2018 | 11 | 11 |
| 2019 | 8 | 6 |
| 2020 | 8 | 5 |
| 2021 | 6 | 1 |
| 2022 | 2 | 3 |
| 2023 | 0 | 0 |
| 2024 | 0 | 1 |
By publication year.
Recent patents
- Buk acoustic wave resonator with guard rings having recessed space from electrode edge and periodic designs19 Jul 2022US 11,394,361 B2Texas Instruments Incorporated
- Systems and methods for designing MEMS scanning mirrors involving finite element analysis model1 Mar 2022US 11,263,357 B2Beijing Voyoager Technology Co., Ltd.
- Planar cavity MEMS and related structures, methods of manufacture and design structures16 Nov 2021US 11,174,160 B2International Business Machines Corporation
- Planar cavity mems and related structures, methods of manufacture and design structures7 Sep 2021US 11,111,138 B2International Business Machines Corporation
- Planar cavity MEMS and related structures, methods of manufacture and design structures7 Sep 2021US 11,111,139 B2International Business Machines Corporation
- Model training system and method5 Sep 2024US 2024/0296327 A1
- Systems and methods for designing mems scanning mirrors involving finite element analysis model5 May 2022US 2022/0138360 A1Beijing Voyager Technology Co., Ltd.
- System and method for designing mems mirror based on computed quality factor5 May 2022US 2022/0138372 A1
- System and method for computing quality factor of mems mirror5 May 2022US 2022/0138384 A1Beijing Voyager Technology Co., Ltd.
- Systems and methods for designing mems scanning mirrors23 Dec 2021US 2021/0397756 A1Beijing Voyager Technology Co., Ltd.
Most cited
By later US patents
- Microfluidic design automation method and system134US 6,829,753 B2Fluidigm Corporation · 2004
- Microfluidic design automation method and system132US 7,526,741 B2Fluidigm Corporation · 2009
- Computer aided design method and system for developing a microfluidic system99US 7,062,418 B2Fluidigm Corporation · 2006
- MEMS modeling system and method50US 9,122,827 B2Taiwan Semiconductor Manufacturing Company.Ltd · 2015
- Planar cavity MEMS and related structures, methods of manufacture and design structures48US 8,921,144 B2International Business Machines Corporation · 2014