Buk acoustic wave resonator with guard rings having recessed space from electrode edge and periodic designs
AssigneeTexas Instruments Incorporated
InventorsTing-Ta Yen, Brian Goodlin, Ricky Alan Jackson, Nicholas Stephen Dellas
Life of this patent
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Abstract
A micromechanical system (MEMS) acoustic wave resonator is formed on a base substrate. A piezoelectric member is mounted on the base substrate. The piezoelectric member has a first electrode covering a first surface of the piezoelectric member and a second electrode covering a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge. A first guard ring is positioned on the second electrode spaced apart from the perimeter edge of the second electrode.
Claims20
A micromechanical system (MEMS) resonator comprising:
- a base substrate;
- a piezoelectric member mounted on the base substrate, the piezoelectric member having a first electrode attached to a first surface of the piezoelectric member and a second electrode attached to a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge;
- and
- a guard ring attached to the second electrode spaced apart from the perimeter edge of the second electrode.
A micromechanical system (MEMS) resonator comprising:
- a base substrate;
- a piezoelectric member mounted on the base substrate, the piezoelectric member having a first electrode attached to a first surface of the piezoelectric member and a second electrode attached to a second surface of the piezoelectric member opposite the first electrode, the second electrode being bounded by a perimeter edge;
- a first guard ring positioned on the second electrode adjacent to the perimeter edge of the second electrode;
- and
- a second guard ring positioned on the second electrode, wherein the second guard ring is concentric with and surrounded by the first guard ring and spaced periodically from the first guard ring.
A method for designing a micromechanical system (MEMS) resonator, the method comprising:
- selecting a piezoelectric material and material for a top electrode and bottom electrode for a simulated MEMS resonator;
- selecting an initial thickness and width for a guard ring placed on the top electrode, and selecting a space to a perimeter edge of the top electrode from the outside edge of the guard ring;
- simulating operation of the simulated MEMS resonator using a three-dimensional finite element simulator;
- and
- adjusting the thickness, width and space to the perimeter edge and repeating simulating operation of the simulated MEMS resonator.
Dependencies are inferred from the claim text.