MEMS modeling system and method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTung-Tsun Chen, Yung-Chow Peng, Jui-Cheng Huang
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Abstract
A system and method for modeling microelectromechanical devices is disclosed. An embodiment includes separating the microelectromechanical design into separate regions and modeling the separate regions separately. Parametric parameters or parametric equations may be utilized in the separate models. The separate models may be integrated into a MEMS device model. The MEMS device model may be tested and calibrated, and then may be used to model new designs for microelectromechanical devices.
Claims20
A microelectromechanical device modeling system comprising:
- a two-dimensional mask database configured to store a first model and a second model, the first model comprising a first region model of a first region of a microelectromechanical device and the second model comprising a second region model of a second region of the microelectromechanical device, the first model and the second model modeling separate structures of the microelectromechanical device;
- and
- a processor configured to derive a MEMS model from the first model and the second model.
A modeling system comprising:
- a database, wherein the database is configured to store a first two-dimensional mask model and a second two-dimensional mask model, wherein the first two-dimensional mask model comprises a first structural model of a microelectromechanical device, wherein the second two-dimensional mask model comprises a second structural model of the microelectromechanical device, wherein the first structural model is different from the second structural model;
- and
- a processor communicably coupled to the database, wherein the processor is configured to generate a MEMS model at least in part from the first structural model and the second structural model.
A microelectromechanical modeling system comprising:
- a two-dimensional mask database for storing an electrode model and a mass model, wherein the electrode model and the mass model represent different sections of a microelectromechanical accelerometer;
- and
- a processor communicably coupled to the two-dimensional mask database, wherein the processor is configured to receive the electrode model and the mass model from the two-dimensional mask database and generate a MEMS accelerometer model from the electrode model and the mass model.
Dependencies are inferred from the claim text.