Systems and methods for designing mems scanning mirrors involving finite element analysis model
AssigneeBeijing Voyager Technology Co., Ltd.
InventorsYoumin Wang, Qin Zhou, Gary Li
Life of this patent
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Abstract
Embodiments of the disclosure provide a design method for a LiDAR scanning mirror. The design method may include determining, by at least one processor, design parameters of the LiDAR scanning mirror and computing one or more mirror performance indexes, by the at least one processor, by applying a Finite Element Analysis (FEA) model to the design parameters. The method may further include when the mirror performance indexes meet a predetermined target performance, providing the design parameters determined by the at least one processor for making the LiDAR scanning mirror.
Claims20
A method for designing a LiDAR scanning mirror, comprising:
- determining, by at least one processor, design parameters of the LiDAR scanning mirror;
- computing one or more mirror performance indexes, by the at least one processor, by applying a Finite Element Analysis (FEA) model to the design parameters;
- and
- when the mirror performance indexes meet a predetermined target performance, providing the design parameters determined by the at least one processor for making the LiDAR scanning mirror.
A method for making a LiDAR scanning mirror, comprising:
- determining, by at least one processor, design parameters of the LiDAR scanning mirror, wherein the design parameters yield one or more mirror performance indexes that meet a predetermined target performance, wherein the mirror performance indexes are computed by applying a Finite Element Analysis (FEA) model to the design parameters;
- and
- making the LiDAR scanning mirror based on the design parameters determined by the at least one processor.
A LiDAR scanning mirror, comprising:
- at least one MEMS mirror;
- and
- at least one spring coupling the MEMS mirror to an anchor,
- wherein the MEMS mirror and the spring are made according to design parameters yielding one or more mirror performance indexes that meet a predetermined target performance, wherein the mirror performance indexes are computed by applying a Finite Element Analysis (FEA) model to the design parameters.
Dependencies are inferred from the claim text.