System and method for computing quality factor of mems mirror

A design system for an optical sensing system, comprising:

• a communication interface configured to receive a first set of design parameters and a second set of design parameters of a scanning mirror;
• and
• at least one processor, configured to:
• compute a first quality factor associated with slide film damping of the scanning mirror based on the first set of design parameters;
• compute a second quality factor associated with squeeze film damping of the scanning mirror based on the second set of design parameters using a simulation model;
• compute a third quality factor associated with the scanning mirror on the first quality factor and the second quality factor;
• and
• output the third quality factor associated with the scanning mirror.

A non-transitory computer-readable medium having stored thereon computer instructions, when executed by at least one processor, configured to perform a design method for a scanning mirror of an optical sensing system, the method comprises:

• receiving a first set of design parameters and a second set of design parameters of the scanning mirror;
• computing a first quality factor associated with slide film damping of the scanning mirror based on the first set of design parameters;
• computing a second quality factor associated with squeeze film damping of the scanning mirror based on the second set of design parameters using a simulation model;
• computing a third quality factor associated with the scanning mirror based on the first quality factor and the second quality factor;
• and
• outputting the third quality factor associated with the scanning mirror.