G02B 17/0657
Off-axis or unobscured systems in which all of the mirrors share a
Official title: {off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry}
G02B17/0657 (Off-axis or unobscured systems in which all of the mirrors share a) appears on 181 US grants and 164 published applications in this corpus.
Search patents in G02B- Granted patents
- 181
- Published applications
- 164
- Assignees
- 44
- Inventors
- 182
- Latest grant
- 2 Sep 2025
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 1 | 0 |
| 1993 | 1 | 0 |
| 1994 | 2 | 0 |
| 1995 | 3 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 4 | 0 |
| 1999 | 3 | 0 |
| 2000 | 4 | 0 |
| 2001 | 13 | 1 |
| 2002 | 6 | 5 |
| 2003 | 3 | 10 |
| 2004 | 4 | 14 |
| 2005 | 8 | 5 |
| 2006 | 9 | 12 |
| 2007 | 11 | 15 |
| 2008 | 13 | 9 |
| 2009 | 10 | 10 |
| 2010 | 2 | 6 |
| 2011 | 8 | 10 |
| 2012 | 7 | 11 |
| 2013 | 4 | 6 |
| 2014 | 10 | 4 |
| 2015 | 6 | 7 |
| 2016 | 6 | 3 |
| 2017 | 9 | 8 |
| 2018 | 5 | 7 |
| 2019 | 5 | 4 |
| 2020 | 5 | 3 |
| 2021 | 2 | 5 |
| 2022 | 2 | 3 |
| 2023 | 2 | 3 |
| 2024 | 3 | 0 |
| 2025 | 2 | 1 |
| 2026 | 0 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Reflective pupil relay optics for mems scanning system2 Sep 2025US 12,405,457 B2STMicroelectronics International N. V.
- Systems and methods for terahertz imaging21 Jan 2025US 12,204,066 B2Sequestim Limited
- Image-forming optical system, exposure apparatus, and device producing method1 Oct 2024US 12,105,428 B2Nikon Corporation
- Imaging apparatus and manufacturing method of imaging apparatus9 Apr 2024US 11,953,665 B2Canon Kabushiki Kaisha
- Projection exposure method and projection lens with setting of the pupil transmission20 Feb 2024US 11,906,904 B2Carl Zeiss SMT GmbH
- Imaging euv optical unit for imaging an object field into an image field22 Jan 2026US 2026/0023326 A1
- Imaging euv optical unit for imaging an object field into an image field15 Jan 2026US 2026/0016755 A1
- Image-forming optical system, exposure apparatus, and device producing method9 Jan 2025US 2025/0013156 A1Nikon Corporation
- Reflective pupil relay optics for mems scanning system21 Sep 2023US 2023/0296868 A1STMicroelectronics International N. V.
- Systems and methods for terahertz imaging6 Apr 2023US 2023/0105624 A1Sequestim Limited
Most cited
By later US patents
- High numerical aperture ring field optical reduction system150US 5,815,310 ASVG Lithography Systems, Inc. · 1998
- Apparatus for semiconductor lithography124US 5,063,586 AAT&T Bell Laboratories · 1991
- High numerical aperture ring field projection system for extreme ultraviolet lithography123US 6,033,079 A2000
- Projection lithography system and method using all-reflective optical elements117US 5,686,728 A1997
- Ringfield lithography107US 5,315,629 AAT&T Bell Laboratories · 1994