G02B 17/0647
Using more than three curved mirrors
Official title: {using more than three curved mirrors (G02B17/0668, G02B17/0694 take precedence)}
G02B17/0647 (Using more than three curved mirrors) appears on 438 US grants and 408 published applications in this corpus.
Search patents in G02B- Granted patents
- 438
- Published applications
- 408
- Assignees
- 117
- Inventors
- 533
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 4 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 4 | 0 |
| 1993 | 2 | 0 |
| 1994 | 4 | 0 |
| 1995 | 5 | 0 |
| 1996 | 2 | 0 |
| 1997 | 4 | 0 |
| 1998 | 4 | 0 |
| 1999 | 5 | 0 |
| 2000 | 8 | 0 |
| 2001 | 17 | 1 |
| 2002 | 7 | 14 |
| 2003 | 9 | 22 |
| 2004 | 11 | 28 |
| 2005 | 21 | 20 |
| 2006 | 25 | 18 |
| 2007 | 19 | 25 |
| 2008 | 23 | 15 |
| 2009 | 15 | 15 |
| 2010 | 9 | 19 |
| 2011 | 14 | 22 |
| 2012 | 18 | 27 |
| 2013 | 11 | 16 |
| 2014 | 18 | 23 |
| 2015 | 18 | 13 |
| 2016 | 23 | 16 |
| 2017 | 20 | 17 |
| 2018 | 18 | 16 |
| 2019 | 18 | 13 |
| 2020 | 16 | 12 |
| 2021 | 15 | 16 |
| 2022 | 7 | 11 |
| 2023 | 11 | 7 |
| 2024 | 10 | 10 |
| 2025 | 4 | 6 |
| 2026 | 8 | 6 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Subgroups
Granted patents
Recent patents
- Imaging optical unit30 Jun 2026US 12,669,755 B2Carl Zeiss SMT GmbH
- Optical pulse stretcher, laser apparatus, and electronic device manufacturing method30 Jun 2026US 12,671,220 B2Gigaphoton Inc.
- Pulse stretcher and electronic device manufacturing method26 May 2026US 12,640,532 B2Gigaphoton Inc.
- Illumination optical device comprising a collimator having low intrinsic noise19 May 2026US 12,631,859 B2Leonardo S.P.A.
- Optical focusing and collection system19 May 2026US 12,631,864 B2Centre National De La Recherche Scientifique
- Anti-Counterfeiting Element20 Aug 2026US 2026/0244007 A1China Banknote Printing and Minting Corp.
- Imaging optical unit16 Jul 2026US 2026/0202752 A1Carl Zeiss SMT GmbH
- Catoptric System Using Scheimpflug Optics26 Feb 2026US 2026/0056473 A1KLA Corporation
- Imaging euv optical unit for imaging an object field into an image field22 Jan 2026US 2026/0023326 A1
- Imaging euv optical unit for imaging an object field into an image field15 Jan 2026US 2026/0016755 A1
Most cited
By later US patents
- High numerical aperture ring field optical reduction system150US 5,815,310 ASVG Lithography Systems, Inc. · 1998
- Apparatus for semiconductor lithography124US 5,063,586 AAT&T Bell Laboratories · 1991
- High numerical aperture ring field projection system for extreme ultraviolet lithography123US 6,033,079 A2000
- Projection lithography system and method using all-reflective optical elements117US 5,686,728 A1997
- Ringfield lithography107US 5,315,629 AAT&T Bell Laboratories · 1994