G02B 17/0663
Off-axis or unobscured systems in which not all of the mirrors share
Official title: {off-axis or unobscured systems in which not all of the mirrors share a common axis of rotational symmetry, e.g. at least one of the mirrors is warped, tilted or decentered with respect to the other elements}
G02B17/0663 (Off-axis or unobscured systems in which not all of the mirrors share) appears on 217 US grants and 207 published applications in this corpus.
Search patents in G02B- Granted patents
- 217
- Published applications
- 207
- Assignees
- 62
- Inventors
- 295
- Latest grant
- 30 Jun 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 1 | 0 |
| 1977 | 0 | 0 |
| 1978 | 0 | 0 |
| 1979 | 0 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 1 | 0 |
| 1984 | 2 | 0 |
| 1985 | 1 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 0 | 0 |
| 1989 | 2 | 0 |
| 1990 | 0 | 0 |
| 1991 | 1 | 0 |
| 1992 | 1 | 0 |
| 1993 | 0 | 0 |
| 1994 | 1 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 2 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 4 | 0 |
| 2001 | 4 | 0 |
| 2002 | 1 | 8 |
| 2003 | 7 | 12 |
| 2004 | 6 | 12 |
| 2005 | 11 | 13 |
| 2006 | 15 | 6 |
| 2007 | 7 | 10 |
| 2008 | 11 | 6 |
| 2009 | 3 | 5 |
| 2010 | 7 | 9 |
| 2011 | 2 | 6 |
| 2012 | 9 | 14 |
| 2013 | 3 | 9 |
| 2014 | 7 | 14 |
| 2015 | 10 | 11 |
| 2016 | 14 | 10 |
| 2017 | 13 | 8 |
| 2018 | 11 | 8 |
| 2019 | 12 | 6 |
| 2020 | 10 | 9 |
| 2021 | 9 | 9 |
| 2022 | 5 | 6 |
| 2023 | 7 | 3 |
| 2024 | 5 | 5 |
| 2025 | 1 | 3 |
| 2026 | 5 | 5 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Imaging optical unit30 Jun 2026US 12,669,755 B2Carl Zeiss SMT GmbH
- Optical pulse stretcher, laser apparatus, and electronic device manufacturing method30 Jun 2026US 12,671,220 B2Gigaphoton Inc.
- Illumination optical device comprising a collimator having low intrinsic noise19 May 2026US 12,631,859 B2Leonardo S.P.A.
- Imaging optical unit7 Apr 2026US 12,596,307 B2Carl Zeiss SMT GmbH
- Field facet system and lithography apparatus10 Feb 2026US 12,547,080 B2Carl Zeiss SMT GmbH
- Imaging optical unit16 Jul 2026US 2026/0202752 A1Carl Zeiss SMT GmbH
- Catoptric System Using Scheimpflug Optics26 Feb 2026US 2026/0056473 A1KLA Corporation
- Imaging euv optical unit for imaging an object field into an image field22 Jan 2026US 2026/0023326 A1
- Imaging euv optical unit for imaging an object field into an image field15 Jan 2026US 2026/0016755 A1
- Hybrid reflective/refractive head mounted display1 Jan 2026US 2026/0003189 A1Optique Debt Investment, LLC
Most cited
By later US patents
- Reflecting optical imaging apparatus using spherical reflectors and producing an intermediate image83US 5,071,240 ANikon Corporation · 1991
- Reflecting type optical system67US 6,166,866 ACanon Kabushiki Kaisha · 2000
- Reflection optical system59US 4,701,035 ACanon Kabushiki Kaisha · 1987
- Reflecting type of zoom lens59US 6,021,004 ACanon Kabushiki Kaisha · 2000
- Reduction objective for extreme ultraviolet lithography58US 6,244,717 B1Carl-Zeiss-Stiftung · 2001