G01R 33/0286
Comprising microelectromechanical systems [mems]
Official title: {comprising microelectromechanical systems [MEMS] (MEMS devices in general B81B)}
G01R33/0286 (Comprising microelectromechanical systems [mems]) appears on 149 US grants and 147 published applications in this corpus.
Search patents in G01R- Granted patents
- 149
- Published applications
- 147
- Assignees
- 95
- Inventors
- 364
- Latest grant
- 6 Oct 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1994 | 1 | 0 |
| 1995 | 0 | 0 |
| 1996 | 4 | 0 |
| 1997 | 1 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 0 |
| 2002 | 5 | 3 |
| 2003 | 3 | 2 |
| 2004 | 1 | 3 |
| 2005 | 3 | 5 |
| 2006 | 3 | 2 |
| 2007 | 4 | 7 |
| 2008 | 5 | 2 |
| 2009 | 3 | 1 |
| 2010 | 2 | 3 |
| 2011 | 2 | 6 |
| 2012 | 3 | 4 |
| 2013 | 5 | 7 |
| 2014 | 11 | 9 |
| 2015 | 5 | 9 |
| 2016 | 5 | 12 |
| 2017 | 17 | 7 |
| 2018 | 4 | 7 |
| 2019 | 9 | 5 |
| 2020 | 7 | 7 |
| 2021 | 4 | 5 |
| 2022 | 6 | 11 |
| 2023 | 5 | 10 |
| 2024 | 13 | 10 |
| 2025 | 8 | 4 |
| 2026 | 3 | 6 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Three-dimensional on-chip magnetic sensor for oscillating magnetic fields6 Oct 2026US 12,754,258 B2California Institute of Technology
- On-chip electrical coil and three-dimensional on-chip magnetic sensor including on-chip electrical coil26 May 2026US 12,638,518 B2California Institute of Technology
- Sensing system having a MEMS nitrogen vacancy sensing device and related methods17 Feb 2026US 12,553,959 B2Eagle Technology, LLC
- Magnetic field sensor and sensor assembly2 Dec 2025US 12,487,294 B2Endress + Hauser GmbH + Co. KG
- Magnetoelectric antenna arrays4 Nov 2025US 12,463,618 B2Winchester Technologies, LLC
- Magnetic field gradient sensor1 Oct 2026US 2026/0298970 A1Melexis Technologies SA
- Assembly for compensating for the temperature of a first component of a first part17 Sep 2026US 2026/0276746 A1Endress + Hauser GmbH + Co. KG
- Magneto-mechanical accelerometer13 Aug 2026US 2026/0235640 A1Politecnico Di Bari
- Sensor device, production method for a sensor device, and operation method for a sensor device30 Jul 2026US 2026/0223602 A1
- Increasing signal-to-noise ratio of miniature magneto-mechanical resonators9 Jul 2026US 2026/0191425 A1Koninklijke Philips N. V.
Most cited
By later US patents
- Comb drive micromechanical tuning fork gyro175US 5,349,855 AThe Charles Stark Draper Laboratory, Inc. · 1994
- Q-controlled microresonators and tunable electronic filters using such resonators155US 5,491,604 AThe Regents of the University of California · 1996
- Atomic magnetometer and method of sensing magnetic fields122US 8,334,690 B2The United States of America as represented by the Secretary of Commerce, The National Institute of Standards and Technology · 2012
- Microelectromechanical lateral accelerometer119US 5,563,343 ACornell Research Foundation, Inc. · 1996
- Microelectromechanical lateral accelerometer102US 5,610,335 ACornell Research Foundation, Inc. · 1997