Magnetic field gradient sensor
AssigneeMelexis Technologies SA
InventorsGael CLOSE, Maurizio TORMEN, Enrico GASPARIN, Arnold Christiaan HOOGERWERF, Dara BAYAT, Michel DESPONT
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AssigneeMelexis Technologies SA
InventorsGael CLOSE, Maurizio TORMEN, Enrico GASPARIN, Arnold Christiaan HOOGERWERF, Dara BAYAT, Michel DESPONT
Estimating the term…
A MEMS structure includes: a first platform comprising a first material, and further includes an object or layer of a second, magnetic material, having a first magnetization; and a second platform including a third material, and optionally further including an object or layer of a fourth material being a non-magnetic material, or being magnetic and having a second magnetization different from the first magnetization; the first platform and the second platform being movable in a first direction caused by an ambient acceleration and/or by an ambient magnetic field gradient; at least one sensor. A sensor device includes the MEMS structure and a processing circuit connected to the sensor. A method is for determining a magnetic field gradient using the MEMS structure.
-15. (canceled)
A MEMS structure comprising:
Dependencies are inferred from the claim text.