Sensor device, production method for a sensor device, and operation method for a sensor device

Abstract

A sensor device. The sensor device includes at least one first substrate having a first substrate surface; a sensor element layer having at least one sensitive element arranged in the sensor element layer, wherein the sensor element layer covers the first substrate surface and/or at least one intermediate layer at least partially covering the first substrate surface; and at least one capacitor apparatus, wherein the at least one capacitor apparatus is formed in the first substrate and/or in a second substrate which is electrically connected to the first substrate via at least one bonding connection. A production method for a sensor device, and an operation method for a sensor device, are also described.

Dependencies are inferred from the claim text.