Sensing system having a MEMS nitrogen vacancy sensing device and related methods

A microelectromechanical system (MEMS) device comprising:

• a MEMS substrate having a resonator cavity formed therein;
• at least one MEMS structural resonator beam carried by the MEMS substrate within the resonator cavity;
• and
• a diamond layer carried by the MEMS substrate above the resonator cavity and comprising at least one nitrogen vacancy center (NVC) aligned with the at least one MEMS structural resonator beam.

A method for making a microelectromechanical system (MEMS) device comprising:

• forming a resonator cavity within a MEMS substrate;
• forming at least one MEMS structural resonator beam carried by the MEMS substrate within the resonator cavity;
• and
• coupling a diamond layer to the MEMS substrate above the resonator cavity and comprising at least one nitrogen vacancy center (NVC) aligned with the at least one MEMS structural resonator beam.

A microelectromechanical system (MEMS) device comprising:

• a MEMS substrate having a resonator cavity formed therein;
• at least one MEMS resonator beam carried by the MEMS substrate within the resonator cavity, the at least one resonator beam comprising a conductive silicon layer and a ferromagnetic body carried thereby;
• and
• a diamond layer carried by the MEMS substrate above the resonator cavity and comprising at least one nitrogen vacancy center (NVC) aligned with the at least one MEMS resonator beam.