G01P 2015/0837
The mass being suspended so as to only allow movement perpendicular to
Official title: {the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor}
G01P2015/0837 (The mass being suspended so as to only allow movement perpendicular to) appears on 62 US grants and 76 published applications in this corpus.
Search patents in G01P- Granted patents
- 62
- Published applications
- 76
- Assignees
- 49
- Inventors
- 173
- Latest grant
- 31 Mar 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 0 | 0 |
| 1999 | 0 | 0 |
| 2000 | 0 | 0 |
| 2001 | 0 | 0 |
| 2002 | 0 | 0 |
| 2003 | 0 | 0 |
| 2004 | 0 | 0 |
| 2005 | 0 | 0 |
| 2006 | 0 | 0 |
| 2007 | 0 | 0 |
| 2008 | 0 | 0 |
| 2009 | 0 | 2 |
| 2010 | 1 | 1 |
| 2011 | 0 | 5 |
| 2012 | 2 | 10 |
| 2013 | 4 | 4 |
| 2014 | 4 | 4 |
| 2015 | 3 | 7 |
| 2016 | 7 | 6 |
| 2017 | 3 | 5 |
| 2018 | 4 | 6 |
| 2019 | 12 | 7 |
| 2020 | 5 | 4 |
| 2021 | 4 | 3 |
| 2022 | 4 | 3 |
| 2023 | 1 | 5 |
| 2024 | 1 | 2 |
| 2025 | 2 | 1 |
| 2026 | 3 | 1 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- MEMS accelerometer with vertical stops31 Mar 2026US 12,590,985 B2STMicroelectronics International N. V.
- Sensor for parallel measurement of pressure and acceleration and use of the sensor in a vehicle battery27 Jan 2026US 12,535,374 B2Infineon Technologies AG
- Motion limiter with reduced stiction20 Jan 2026US 12,528,693 B2Murata Manufacturing Co., Ltd.
- Z-axis microelectromechanical sensor device with improved stress insensitivity18 Nov 2025US 12,474,368 B2STMicroelectronics S,r.l.
- Inertial measurement device and self-diagnosis method of inertial measurement device19 Aug 2025US 12,392,797 B2Seiko Epson Corporation
- Mems transducer with multilayer deflectable membrane28 May 2026US 2026/0145929 A1Infineon Technologies AG
- Plurality of mems for increased bandwidth20 Feb 2025US 2025/0060392 A1InvenSense, Inc.
- Mems accelerometer with vertical stops3 Oct 2024US 2024/0329076 A1NXP USA, Inc.
- Motion limiter with reduced stiction15 Feb 2024US 2024/0051816 A1Murata Manufacturing Co., Ltd.
- Inertial measurement device and self-diagnosis method of inertial measurement device30 Nov 2023US 2023/0384345 A1Seiko Epson Corporation
Most cited
By later US patents
- Monolithic silicon rate-gyro with integrated sensors170US 5,488,862 AD.B.A. Adagio · 1996
- Micromachined hinge having an integral torsion sensor147US 5,648,618 A1997
- Vertically integrated MEMS acceleration transducer43US 8,186,221 B2Freescale Semiconductor, Inc. · 2012
- Laterally integrated MEMS sensor device with multi-stimulus sensing36US 8,387,464 B2Freescale Semiconductor, Inc. · 2013
- Fiber optic MEMS seismic sensor with mass supported by hinged beams21US 7,743,661 B2Halliburton Energy Services.Inc. · 2010