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US 2026/0145929 A1Published application
Mems transducer with multilayer deflectable membrane
AssigneeInfineon Technologies AG
InventorsAbhiraj Basavanna, Alexander Frey, Hans-Jörg Timme, Marc Füldner
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Abstract
A MEMS transducer includes a deflectable membrane where the deflectable membrane includes two first layers and a second layer arranged between the two first layers. The two first layers comprise low-stress silicon nitride, and the second layer comprises doped silicon.
Claims20
A Micro-Electro-Mechanical-System (MEMS) transducer comprising:
- two first layers each comprising low-stress silicon nitride;
- and
- a second layer arranged between the two first layers, the second layer comprising doped silicon, the two first layers and the second layer being a deflectable membrane of the MEMS transducer.
A Micro-Electro-Mechanical-System (MEMS) transducer comprising:
- two first layers each consisting of low-stress silicon nitride;
- and
- a second layer arranged between the two first layers, the second layer consisting of doped silicon, the two first layers and the second layer being a deflectable membrane of the MEMS transducer.
A Micro-Electro-Mechanical-System (MEMS) transducer comprising:
- a deflectable membrane comprising two first layers and a second layer arranged therebetween, the two first layers each comprising low-stress silicon nitride and the second layer comprising doped silicon;
- and
- a rigid electrode arranged opposite the deflectable membrane, the rigid electrode being planar and comprising an electrically conductive layer.
Dependencies are inferred from the claim text.