G01M 11/0271
By using interferometric methods
Official title: {by using interferometric methods}
G01M11/0271 (By using interferometric methods) appears on 263 US grants and 264 published applications in this corpus.
Search patents in G01M- Granted patents
- 263
- Published applications
- 264
- Assignees
- 113
- Inventors
- 504
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 2 | 0 |
| 1988 | 1 | 0 |
| 1989 | 1 | 0 |
| 1990 | 1 | 0 |
| 1991 | 3 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 3 | 0 |
| 1995 | 1 | 0 |
| 1996 | 1 | 0 |
| 1997 | 1 | 0 |
| 1998 | 5 | 0 |
| 1999 | 5 | 0 |
| 2000 | 4 | 0 |
| 2001 | 2 | 3 |
| 2002 | 3 | 5 |
| 2003 | 6 | 12 |
| 2004 | 8 | 13 |
| 2005 | 11 | 6 |
| 2006 | 8 | 9 |
| 2007 | 6 | 8 |
| 2008 | 10 | 16 |
| 2009 | 9 | 10 |
| 2010 | 13 | 16 |
| 2011 | 12 | 12 |
| 2012 | 11 | 8 |
| 2013 | 12 | 9 |
| 2014 | 8 | 11 |
| 2015 | 11 | 11 |
| 2016 | 5 | 14 |
| 2017 | 10 | 5 |
| 2018 | 9 | 8 |
| 2019 | 11 | 13 |
| 2020 | 15 | 14 |
| 2021 | 10 | 10 |
| 2022 | 9 | 17 |
| 2023 | 8 | 12 |
| 2024 | 9 | 10 |
| 2025 | 11 | 9 |
| 2026 | 8 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Measurement device for interferometric measurement of a surface shape15 Sep 2026US 12,736,331 B2Carl Zeiss SMT GmbH
- Method and device for determining geometric information relating to interfaces of an optical element25 Aug 2026US 12,716,808 B2Fogale Nanotech
- Interferometric measuring device2 Jun 2026US 12,644,693 B2Taylor Hobson Limited
- Transmissive diffraction grating2 Jun 2026US 12,645,017 B2ASML Netherlands B. V.
- Measurement system and method of use19 May 2026US 12,631,519 B2ASML Netherlands B. V.
- Optical phase analyzing system and optical phase analyzing method25 Jun 2026US 2026/0177453 A1Industrial Technology Research Institute
- Interferometric measuring device28 May 2026US 2026/0146845 A1Taylor Hobson Limited
- Lens measuring method and lens measuring device19 Feb 2026US 2026/0049894 A1Panasonic Intellectual Property Management Co., Ltd.
- Method for the interferometric determination of the surface shape of a test object18 Dec 2025US 2025/0383198 A1Carl Zeiss SMT GmbH
- Method and apparatus for determining a physical quantity23 Oct 2025US 2025/0328085 A1ASML Netheriands B. V.
Most cited
By later US patents
- Method of manufacturing an optical system73US 6,312,373 B1Nikon Corporation · 2001
- Geometric measurement system and method of measuring a geometric characteristic of an object67US 7,616,330 B2AMO Wavefront Sciences, LLC · 2009
- Method and apparatus for evaluating aberrations of optical element and method and apparatus for adjusting optical unit and lens56US 6,809,829 B1Matsushita Electric Industrial Co., Ltd. · 2004
- Apparatus and methods for measuring wavefront aberrations of a microlithography projection lens49US 5,898,501 ANikon Corporation · 1999
- Phase-shifting point diffraction interferometer44US 5,835,217 AThe Regents of the University of California · 1998