Method and apparatus for evaluating aberrations of optical element and method and apparatus for adjusting optical unit and lens

A lens evaluation method comprising:

• condensing light emitted from a light source by an objective lens, projecting the condensed light onto a reflecting diffraction grating, collimating two diffracted rays of different orders reflected by the reflecting diffraction grating into generally parallel light, condensing the collimated generally parallel light by a condenser lens, focusing the condensed light onto an image receiving surface, and obtaining a shearing interference figure;
• moving the reflecting diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the two diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays;
• and
• determining characteristics of the objective lens based on the phases.

A lens evaluation method comprising:

• condensing light emitted from a light source by an objective lens, projecting the condensed light onto a transmission diffraction grating, collimating two diffracted rays of different orders transmitted by the transmission diffraction grating into generally parallel light, condensing the collimated generally parallel light by a condenser lens, focusing the condensed light onto an image receiving surface, and obtaining a shearing interference figure;
• moving the transmission diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the two diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays;
• and
• determining characteristics of the objective lens based on the phases.

A lens evaluation method comprising:

• diffracting light derived from a lens with a diffraction grating, thereby obtaining a shearing interference figure of a 0th-order diffracted ray and either one of ±1st-order diffracted rays, or of a +1st-order diffracted ray and a −1st-order diffracted ray, on an image receiving surface;
• moving the diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line segment which passes through optical axes of the diffracted rays;
• and
• given that the measuring points are X and the phases are Y, fitting a linear function, or a function having a more than a first order, of the measuring points X to the phases Y, and evaluating defocus amount of an optical system by a first-order coefficient value of the fitted function.

A lens evaluation method comprising:

• diffracting light derived from a lens with diffraction grating, thereby obtaining a shearing interference figure of a 0th-order diffracted ray and either one of ±1st-order diffracted rays, or of a +1st-order diffracted ray and a −1st-order diffracted ray, on an image receiving surface;
• moving the diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a vertical bisector of a line segment interconnecting optical axes of the diffracted rays;
• and
• given that the measuring points are X and the phases are Y, fitting a quadratic function of the measuring points X to the phases Y, and evaluating coma by a second-order coefficient value of the quadratic function.

A lens evaluation method comprising:

• diffracting light derived from a lens with a diffraction grating, thereby obtaining a shearing interference figure of a 0th-order diffracted ray and either one of ±1st-order diffracted rays, or of a +1st-order diffracted ray and a −1st-order diffracted ray, on an image receiving surface;
• moving the diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on two oblique lines which pass a midpoint of a line segment interconnecting optical axes of the diffracted rays and which form a specified angle in positive and negative directions to the line segment;
• and
• given that the measuring points are X and the phases are Y, fitting a quadratic function or cubic function of the measuring points X to the phases Y, and evaluating coma by a second-order coefficient value of the quadratic function or cubic function.

A lens evaluation method comprising:

• diffracting light derived from a lens with a diffraction grating, thereby obtaining a shearing interference figure of a 0th-order diffracted ray and either one of ±1st-order diffracted rays, or of a +1st-order diffracted ray and a −1st-order diffracted ray, on an image receiving surface;
• moving the diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a vertical bisector which passes a midpoint of a line segment interconnecting optical axes of the diffracted rays and on two oblique lines which form a specified angle in positive and negative directions to the line segment;
• and
• with respect to the vertical bisector, given that the measuring points are X and the phases are Y, fitting a quadratic function or cubic function of the measuring points X to the phases Y, and obtaining a second-order coefficient value of the quadratic function or cubic function, and
• with respect to the two oblique lines, given that the measuring points are X and the phases are Y, fitting a quadratic function or cubic function of the measuring points X to the phases Y, and obtaining a second-order coefficient value of the quadratic function or cubic function, and then evaluating coma by using a difference between the first and second second-order coefficient values.

A lens evaluation method comprising:

• diffracting light derived from a lens with a diffraction grating, thereby obtaining a shearing interference figure of a 0th-order diffracted ray and either one of ±1st-order diffracted rays, or of a +1st-order diffracted ray and a −1st-order diffracted ray, on an image receiving surface;
• rotating a shearing direction of the shearing interference figure;
• moving the diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a vertical bisector which interconnects optical axes of the diffracted rays;
• and
• given that the measuring points are X and the phases are Y, fitting a linear function, or a function having more than a first order, of the measuring points X to the phases Y, and evaluating astigmatism of an optical system by a first-order coefficient value of the fitted function.

A lens evaluation method comprising:

• diffracting light derived from a lens with diffraction grating, thereby obtaining a shearing interference figure of a 0th-order diffracted ray and either one of ±1st-order diffracted rays, or of a +1st-order diffracted ray and a −1st-order diffracted ray, on an image receiving surface;
• moving the diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line segment which passes through optical axes of the diffracted rays;
• and
• given that the measuring points are X and the phases are Y, fitting a cubic function or biquadratic function of the measuring points X to the phases Y, and evaluating spherical aberration of an optical system by a third-order coefficient value of the cubic function or biquadratic function.

A lens evaluation method comprising:

• diffracting light derived from a lens with diffraction grating, thereby obtaining a shearing interference figure of a 0th-order diffracted ray and either one of ±1st-order diffracted rays, or of a +1st-order diffracted ray and a −1st-order diffracted ray, on an image receiving surface;
• moving the diffraction grating in a direction having a directional component perpendicular to a grating direction, thereby changing phases of the diffracted rays;
• in the shearing interference figure,
• determining first phases of light intensity changes at a plurality of first measuring points on a line segment which interconnects optical axes of the diffracted rays,
• determining second phases of light intensity changes at a plurality of second measuring points on a vertical bisector of the line segment,
• determining third phases of light intensity changes at a plurality of third measuring points on a third oblique line which passes a midpoint of the line segment and which forms a specified angle in a positive direction to the line segment, and
• determining fourth phases of light intensity changes at a plurality of fourth measuring points on a fourth oblique line which passes the midpoint of the line segment and which forms a specified angle in a negative direction to the line segment;
• given that the first measuring points are X and the first phases are Y, fitting a first function F of the first measuring points X to the first phases Y,
• given that the second measuring points are X and the second phases are Y, fitting a second function F of the second measuring points X to the second phases Y,
• given that the third measuring points are X and the third phases are Y, fitting a third function F of the third measuring points X to the third phases Y, and
• given that the fourth measuring points are X and the fourth phases are Y, fitting a fourth function F of the fourth measuring points X to the fourth phases Y, and then
• evaluating higher-order aberrations of an optical system based on
• a residual Δ between the first function F and the first phases Y,
• a residual Δ between the second function F and the second phases Y,
• a residual Δ between the third function F and the third phases Y, and
• a residual Δ between the fourth function F and the fourth phases Y.

A lens adjustment method for adjusting a condenser lens included in an optical system, said lens adjustment method comprising:

• diffracting light transmitted by the condenser lens with a diffraction grating letting out shearing interfering light of two diffracted rays of different orders;
• moving the diffraction grating in a direction having a directional component perpendicular to a grating direction;
• receiving the shearing interfering light by an image receiver;
• in an interference figure of the shearing interfering light received by the image receiver, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays, and detecting characteristics of the condenser lens based on the phases with a characteristic detector;
• and
• adjusting a position of the condenser lens with an adjustment mechanism based on a detection result of the characteristic detector.

A lens adjustment method for adjusting a condenser lens included in an optical system, said lens adjustment method comprising:

• collimating light emitted from a light source into generally parallel light, the generally parallel light incident on the condenser lens;
• while moving a reflecting diffraction grating in a direction having a directional component perpendicular to a grating direction, reflecting and diffracting the light condensed by the condenser lens with the reflecting diffraction grating, shearing interfering light of two diffracted rays of different orders thereby being incident on the condenser lens;
• forming an image of the shearing interfering light emitted from the condenser lens;
• receiving the image of the shearing interfering light with an image receiver;
• and
• in the shearing interference figure received by the image receiver, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays, and determining characteristics of the condenser lens based on the phases with a characteristic detector,
• the characteristic detector:
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line which interconnects optical axes of the two diffracted rays;
• and
• given that the measuring points are X and the phases are Y, fitting a linear function of the measuring points X to the phases Y, and evaluating defocus amount of the optical system by a first-order coefficient value of the linear function.

A lens adjustment method for adjusting a condenser lens included in an optical system, said lens adjustment method comprising:

• step for collimating light emitted from a light source into generally parallel light, the generally parallel light being incident on the condenser lens;
• while moving a transmission diffraction grating in a direction having a directional component perpendicular to a grating direction, transmitting and diffracting light condensed by the condenser lens with the transmission diffraction grating, shearing interfering light of two diffracted rays of different orders thereby being incident on a second condenser lens;
• forming an image of the shearing interfering light emitted from the second condenser lens;
• receiving the image of the shearing interfering light with an image receiver;
• and
• in the shearing interference figure received by the image receiver, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays, and determining characteristics of the condenser lens based on the phases with a characteristic detector,
• the characteristic detector:
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line which interconnects optical axes of the two diffracted rays;
• and
• given that the measuring points are X and the phases are Y, fitting a linear function of the measuring points X to the phases Y, and evaluating defocus amount of the optical system by a first-order coefficient value of the linear function.

A lens adjustment method for adjusting a condenser lens included in an optical system, said lens adjustment method comprising:

• collimating light emitted from a light source into generally parallel light, the generally parallel light being incident on the condenser lens;
• while moving a reflecting diffraction grating in a direction having a directional component perpendicular to a grating direction, reflecting and diffracting light condensed by the condenser lens with the reflecting diffraction grating, shearing interfering light of two diffracted rays of different orders thereby being incident on the condenser lens;
• forming an image of the shearing interfering light emitted from the condenser lens;
• receiving the image of the shearing interfering light with an image receiver;
• and
• in the shearing interference figure received by the image receiver, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays, and determining characteristics of the condenser lens based on the phases with a characteristic detector,
• the characteristic detector:
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on two oblique lines which pass a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which form a specified angle in positive and negative directions to the line segment;
• and
• with respect to the individual oblique lines, given that the measuring points are X and the phases are Y, fitting a quadratic function or cubic function of the measuring points X to the phases Y, and evaluating coma by a second-order coefficient value of the quadratic function or cubic function.

A lens adjustment method for adjusting a condenser lens included in an optical system said lens adjustment method comprising:

• collimating light emitted from a light source into generally parallel light, the generally parallel light being incident on the condenser lens;
• while moving a transmission diffraction grating in a direction having a directional component perpendicular to a grating direction, transmitting and diffracting the light condensed b y the condenser lens with the transmission diffraction grating, shearing interfering light of two diffracted rays of different orders thereby being incident on a second condenser lens;
• forming an image of the shearing interfering light emitted from the second condenser lens;
• receiving the image of the shearing interfering light with an image receiver;
• and
• in the shearing interference figure received by the image receiver, determining phases of light intensity changes at a plurality of measuring points on a measuring line which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays, and determining characteristics of the condenser lens based on the phases with a characteristic detector,
• the characteristic detector;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on two oblique lines which pass a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which form a specified angle in positive and negative directions to the line segment;
• and
• with respect to the individual oblique lines, given that the measuring points are X and the phases are Y, fitting a quadratic function or cubic function of the measuring points X to the phases Y, and evaluating coma by a second-order coefficient value of the quadratic function or cubic function.

An optical unit adjustment method comprising:

• preparing a reflecting-and-transmission diffraction grating which has a layer made of a reflective material and a plurality of parallel light-pervious windows formed at specified intervals, and which is placed across an optical axis of light emitted from an optical unit so as to reflect incident light, and further which diffracts light transmitted by the plurality of light-pervious windows so that two diffracted rays of different orders interfere with each other, thus obtaining a shearing interference figure;
• moving the reflecting-and-transmission diffraction grating in a direction having a directional component perpendicular to a grating direction;
• detecting characteristics of the optical unit from the shearing interference figure with a detector;
• adjusting the optical unit based on a detection result of the detector;
• moving the reflecting-and-transmission diffraction grating in the optical-axis direction;
• receiving an image of light reflected by the reflecting-and-transmission diffraction grating with a light receiving element;
• and
• adjusting a position of the light receiving element based on an intensity of the light received by the light receiving element.

An optical unit adjustment method comprising:

• preparing a reflecting-and-transmission diffraction grating in which a plurality of parallel trenches are provided in a surface of a plate made of a light-pervious material with specified intervals, the surface being covered with a semi-light-pervious material, and which is placed across an optical axis of light emitted from an optical unit so as to reflect the incident light, and further which diffracts light transmitted by the plurality of parallel trenches so that two diffracted rays of different orders interfere with each other, thus obtaining a shearing interference figure;
• moving the reflecting-and-transmission diffraction grating in a direction having a directional component perpendicular to a grating direction;
• detecting characteristics of the optical unit from the shearing interference figure with a detector;
• adjusting the optical unit based on a detection result of the detector;
• moving the reflecting-and-transmission diffraction grating in the optical-axis direction;
• receiving an image of light reflected by the reflecting-and-transmission diffraction grating with a light receiving element;
• and
• adjusting a position of the light receiving element based on an intensity of the light received by the light receiving element.

An optical unit adjustment method for adjusting an optical unit having a lens, said optical unit adjustment method comprising:

• preparing a holder having a transparent plate and a transmission diffraction grating which diffracts light emitted from the optical unit and forms a shearing interference figure of diffracted rays of different orders;
• moving the transmission diffraction grating to an operative position transverse across an optical axis of light transmitted by the lens;
• detecting characteristics of the optical unit from the shearing interference figure transmitted by the transmission diffraction grating placed at the operative position;
• adjusting the optical unit based on the detected characteristics of the optical unit;
• moving the transparent plate to an operative position transverse across an optical axis of light transmitted by the lens;
• detecting a positional shift between a center of light intensity distribution and a center of the lens from an image transmitted by the transparent plate placed at the operative position;
• and
• adjusting the lens based on the detected positional shift.

A lens evaluation method comprising:

• diffracting light derived from a lens so that two diffracted rays of different orders interfere with each other, thereby obtaining a shearing interference figure;
• changing phases of the two diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line segment which does not pass through a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which is vertical to a line interconnecting the two optical axes;
• and
• given that the measuring points are Y and the phases are φ, fitting a quadratic function or cubic function of the measuring points Y to the phases φ, and evaluating spherical aberration of the lens by a second-order coefficient value of the function.

A lens evaluation method comprising:

• diffracting light derived from a lens so that two diffracted rays of different orders interfere with each other, thereby obtaining a shearing interference figure;
• changing phases of the two diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line segment which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which forms a specified angle to a line interconnecting the two optical axes;
• and
• given that the measuring points are Z and the phases are φ, fitting a cubic function or biquadratic function of the measuring points Z to the phases φ, and evaluating spherical aberration of the lens by a third-order coefficient value of the function.

A lens evaluation method comprising:

• diffracting light derived from a lens so that two diffracted rays of different orders interfere with each other, thereby obtaining a shearing interference figure;
• changing phases of the two diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line segment which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which forms a specified angle to a line interconnecting the two optical axes;
• and
• given that the measuring points are Z and the phases are φ, fitting a linear function or quadratic function of the measuring points Z to the phases φ, and evaluating defocus of the lens by a first-order coefficient value of the function.

A lens evaluation method comprising:

• diffracting light derived from a lens so that two diffracted rays of different orders interfere with each other, thereby obtaining a shearing interference figure;
• changing phases of the two diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line segment which does not pass through a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which is vertical to a line interconnecting the two optical axes;
• and
• given that the measuring points are Y and the phases are φ, fitting a biquadratic function or quintic function of the measuring points Y to the phases φ, and evaluating fifth-order spherical aberration of the lens by a fourth-order coefficient value of the function.

A lens evaluation method comprising:

• diffracting light derived from a lens so that two diffracted rays of different orders interfere with each other, thereby obtaining a shearing interference figure;
• changing phases of the two diffracted rays;
• in the shearing interference figure, setting line segments which do not pass through a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which are vertical to a line interconnecting the two optical axes, on both sides of a vertical bisector of a line segment interconnecting the two optical axes, and determining phases of light intensity change at a plurality of measuring points on the individual set line segments;
• and
• given that the measuring points are Y1, Y2 and the phases are φ1, φ2, fitting biquadratic functions or quintic functions of the measuring points Y1, Y2 to the phases φ1, φ2, and, given that fourth-order coefficient values of the two functions are a4 and b4, respectively, evaluating fifth-order spherical aberration of the lens by a difference between a4 and b4.

A lens evaluation method comprising:

• diffracting light derived from a lens so that two diffracted rays of different orders interfere with each other, thereby obtaining a shearing interference figure;
• changing phases of the two diffracted rays;
• in the shearing interference figure, determining phases of light intensity changes at a plurality of measuring points on a line segment which passes through a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which forms a specified angle to a line interconnecting the two optical axes;
• and
• given that the measuring points are Y and the phases are φ, fitting a sextic function or septimal function of the measuring points Y to the phases φ, and evaluating seventh-order spherical aberration of the lens by a sixth-order coefficient value of the function.

A lens evaluation method comprising:

• diffracting light derived from a lens so that two diffracted rays of different orders interfere with each other, thereby obtaining a shearing interference figure;
• changing phases of the two diffracted rays;
• in the shearing interference figure, setting line segments which do not pass through a midpoint of a line segment interconnecting optical axes of the two diffracted rays and which are vertical to a line interconnecting the two optical axes, on both sides of a vertical bisector of a line segment interconnecting the two optical axes, and determining phases of light intensity change at a plurality of measuring points on the individual set line segments;
• and
• given that the measuring points positions are Y1, Y2 and the phases are φ1, φ2, fitting sextic functions or septimal functions of the measuring points Y1, Y2 to the phases φ1, φ2, and, given that sixth-order coefficient values of the two functions are a6 and b6, respectively, evaluating seventh-order spherical aberration of the lens by a difference between a6 and b6.