Method and device for determining geometric information relating to interfaces of an optical element
AssigneeFogale Nanotech
InventorsSylvain Petitgrand, Eric Legros
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AssigneeFogale Nanotech
InventorsSylvain Petitgrand, Eric Legros
Estimating the term…
A method for determining an item of information of an interface of an optical element including several interfaces, the method being implemented by a device having at least one optical sensor and at least one light source in order to make a beam pass through at least one of the interfaces and be reflected by the interface to be measured, and in order to detect a signal of interferences between the reflected beam and a reference beam is disclosed. The method also includes positioning of a coherence area at the level of an interface; at least two measurements of the interface in order to produce one interference image per measurement from respective interference signals; rotation of the optical element about a reference axis of the device between the measurements; and processing of the at least two images in order to obtain an item of information of the interface.
A measurement method, for determining an item of geometric information of an interface to be measured of an optical element with respect to a measurement axis, the optical element comprising at least two interfaces, the method being implemented by a measurement device having a reference axis and comprising interferometric measurement means with at least one optical sensor and at least one low-coherence light source, configured for directing a measurement beam along the measurement axis towards the optical element so as to pass through at least one of the at least two interfaces and to be reflected by the interface to be measured and generate a reflected measurement beam, and for selectively detecting an interference signal resulting from interferences between the reflected measurement beam and a reference beam, the device further comprising positioning means and digital processing means,
A measurement device, for determining an item of geometric information of an interface to be measured of an optical element with respect to a measurement axis, the optical element comprising at least two interfaces, the device having a reference axis and comprising:
Dependencies are inferred from the claim text.