G01C 19/5684
The devices involving a micromechanical structure
Official title: the devices involving a micromechanical structure
G01C19/5684 (The devices involving a micromechanical structure) appears on 163 US grants and 151 published applications in this corpus.
Search patents in G01C- Granted patents
- 163
- Published applications
- 151
- Assignees
- 75
- Inventors
- 275
- Latest grant
- 1 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1993 | 1 | 0 |
| 1994 | 0 | 0 |
| 1995 | 2 | 0 |
| 1996 | 3 | 0 |
| 1997 | 2 | 0 |
| 1998 | 1 | 0 |
| 1999 | 3 | 0 |
| 2000 | 2 | 0 |
| 2001 | 3 | 0 |
| 2002 | 1 | 0 |
| 2003 | 1 | 1 |
| 2004 | 0 | 8 |
| 2005 | 4 | 4 |
| 2006 | 3 | 2 |
| 2007 | 2 | 5 |
| 2008 | 4 | 2 |
| 2009 | 4 | 6 |
| 2010 | 3 | 11 |
| 2011 | 5 | 3 |
| 2012 | 6 | 2 |
| 2013 | 7 | 7 |
| 2014 | 3 | 5 |
| 2015 | 5 | 9 |
| 2016 | 7 | 9 |
| 2017 | 12 | 8 |
| 2018 | 7 | 8 |
| 2019 | 15 | 12 |
| 2020 | 15 | 12 |
| 2021 | 10 | 5 |
| 2022 | 14 | 6 |
| 2023 | 6 | 7 |
| 2024 | 3 | 4 |
| 2025 | 5 | 12 |
| 2026 | 4 | 3 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Three dimensional stacked microstructures for use in gyroscopes and other devices1 Sep 2026US 12,723,874 B2The Regents of the University of Michigan
- Methods and devices for calibrating capacitive resonators9 Jun 2026US 12,651,980 B2Panasonic Intellectual Property Management Co., Ltd.
- Chip-scale inertial sensor and inertial measurement unit2 Jun 2026US 12,644,705 B2Zero Point Motion Ltd.
- Universal resonator controller21 Apr 2026US 12,607,463 B1Inertialwave
- Fabrication of MEMS structures from fused silica for inertial sensors8 Jul 2025US 12,351,451 B2Atlantic Inertial Systems Limited
- Annular microelectromechanical angular rate sensor20 Aug 2026US 2026/0242208 A1Northrop Grumman LITEF GmbH
- Vibratory Gyro Element and Gyroscope13 Aug 2026US 2026/0235406 A1Sumitomo Precision Products Co., Ltd.
- Design method for all-fused-silica capacitive planarized micro electro-mechanical systems (mems) gyroscope30 Apr 2026US 2026/0118126 A1National University of Defense Technology
- Microelectromechanical coupling device27 Nov 2025US 2025/0362129 A1Northrop Grumman LITEF GmbH
- Capacitive gyroscope28 Aug 2025US 2025/0271267 A1Atlantic Inertial Systems Limited
Most cited
By later US patents
- Vibrating planar gyro198US 5,226,321 ABritish Aerospace Public Limited Company · 1993
- Silicon integrated angular rate sensor121US 7,908,922 B2Delphi Technologies, Inc. · 2011
- Microstructure for vibratory gyroscope87US 5,450,751 AGeneral Motors Corporation · 1995
- Isolated planar gyroscope with internal radial sensing and actuation87US 7,040,163 B2California Institute of Technology · 2006
- Silicon micromachined motion sensor and method of making79US 5,831,162 ADelco Electronics Corporation · 1998