Microstructure for vibratory gyroscope
AssigneeGeneral Motors Corporation
InventorsMichael W. Putty, David S. Eddy
Life of this patent
Estimating the term…
Abstract
A microstructure for a vibratory gyroscope has a ring portion supported in such a fashion to allow substantially undamped, high-Q radial vibration. The ring portion is electrically conductive and comprises a charge plate for a plurality of radially disposed charge conductive sites around its perimeter for sensing radial displacements thereof. The ring, its support and charge conductive sites are formed within sacrificial molds on one surface of a conventional silicon substrate which may comprise a monolithic integrated circuit.
Claims13
A microstructure for a vibratory gyroscope comprising:
- a silicon substrate platform;
- a ring;
- and
- support means adapted for substantially radially undamped support of the ring from the base.
A microstructure for a vibratory gyroscope comprising:
- a base defining a substantially planar surface;
- support member substantially perpendicular to said planar surface;
- a ring;
- and
- a plurality of equally spaced arcuate members coupling said support member and said ring for supporting said ring coaxially with said support member with a gap provided everywhere therebetween said ring and said planar surface.
A microstructure for a vibratory gyroscope comprising:
- a platform having a rotation sensing axis;
- a substantially ring-like vibratory member concentric with the rotation sensing axis, said vibratory member further being charge conductive;
- support means adapted for substantially radially undamped support of the vibratory member from the platform;
- and
- a plurality of charge conductive sites disposed adjacent the perimeter of said vibratory member to form a corresponding plurality of capacitive sites therewith.
A microstructure for a vibratory gyroscope comprising:
- a platform having a rotation sensing axis;
- a hub secured to the platform and aligned with said axis;
- a substantially ring-like vibratory member concentric with the rotation sensing axis;
- and
- a plurality of radially compliant spokes extending outward from the hub and securing the vibratory member thereto in suspensory spaced relationship to the platform thereby providing substantially radially undamped support to the vibratory member.
Dependencies are inferred from the claim text.