Chip-scale inertial sensor and inertial measurement unit

Abstract

Inertial Sensors and Inertial Measurement Units are provided. In one example, the chip-scale inertial sensor (CSIS) is for detecting a rate of rotation of the CSIS about an axis. The CSIS comprises an optical vibratory gyroscope (OVG) for detecting a first rate of rotation of the CSIS about the axis. The OVG is configured to output a main signal corresponding to the first rate of rotation. The CSIS further comprises an optical Sagnac gyroscope (OSG) for concurrently detecting a second rate of rotation of the CSIS about the axis. The OSG is configured to output a supplementary signal corresponding to the second rate of rotation. The CSIS further comprises a microcontroller configured to receive one or more inputs based on the main signal and supplementary signal, and to determine, based on the one or more inputs, a corrected first rate of rotation of the CSIS about the axis.

Dependencies are inferred from the claim text.