G01B 9/02098
Shearing interferometers
G01B9/02098 (Shearing interferometers) appears on 100 US grants and 85 published applications in this corpus.
Search patents in G01B- Granted patents
- 100
- Published applications
- 85
- Assignees
- 61
- Inventors
- 164
- Latest grant
- 8 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1987 | 4 | 0 |
| 1988 | 2 | 0 |
| 1989 | 1 | 0 |
| 1990 | 0 | 0 |
| 1991 | 2 | 0 |
| 1992 | 0 | 0 |
| 1993 | 0 | 0 |
| 1994 | 3 | 0 |
| 1995 | 0 | 0 |
| 1996 | 0 | 0 |
| 1997 | 0 | 0 |
| 1998 | 0 | 0 |
| 1999 | 2 | 0 |
| 2000 | 0 | 0 |
| 2001 | 3 | 0 |
| 2002 | 0 | 0 |
| 2003 | 2 | 5 |
| 2004 | 2 | 2 |
| 2005 | 3 | 4 |
| 2006 | 1 | 4 |
| 2007 | 3 | 1 |
| 2008 | 3 | 0 |
| 2009 | 2 | 2 |
| 2010 | 4 | 1 |
| 2011 | 3 | 0 |
| 2012 | 2 | 2 |
| 2013 | 1 | 2 |
| 2014 | 3 | 2 |
| 2015 | 0 | 2 |
| 2016 | 2 | 5 |
| 2017 | 3 | 6 |
| 2018 | 5 | 4 |
| 2019 | 11 | 5 |
| 2020 | 3 | 7 |
| 2021 | 8 | 9 |
| 2022 | 5 | 9 |
| 2023 | 5 | 6 |
| 2024 | 4 | 5 |
| 2025 | 6 | 2 |
| 2026 | 2 | 0 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Double-mirror shear interferometer8 Sep 2026US 12,729,950 B2Hochschule Trier
- Compact shearography system with adjustable shear distance3 Mar 2026US 12,566,058 B2Nikon Corporation
- Optical measurement apparatus, measuring method using the same, and method of fabricating semiconductor device using the same1 Jul 2025US 12,345,521 B2Samsung Electronics Co., Ltd.
- Defect inspection apparatus1 Jul 2025US 12,345,653 B2Shimadzu Corporation
- Methods and apparatus for measuring a feature of glass-based substrate20 May 2025US 12,305,983 B2Corning Incorporated
- Phase detection device using phase shifting including geometric phase optical element6 Nov 2025US 2025/0341389 A1PSI System Inc.
- Inferometric measuring apparatus23 Jan 2025US 2025/0027764 A1Carl Zeiss SMT GmbH
- Double-mirror shear interferometer19 Dec 2024US 2024/0418499 A1Hochschule Trier
- Determination of a change of object's shape5 Dec 2024US 2024/0401928 A1Nikon Corporation
- Method, interferometer and signal processing device, each for determining an input phase and/or an input amplitude of an input light field7 Nov 2024US 2024/0369345 A1
Most cited
By later US patents
- Method and apparatus for speckle-shearing interferometric deformation analysis130US 4,682,892 AThe Goodyear Tire & Rubber Company · 1987
- Range gated shearography systems and related methods82US 7,667,824 B1Alpha Technology, LLC · 2010
- Interferometer for measuring optical phase differences66US 4,872,755 ACarl-Zeiss-Stiftung · 1989
- Hybrid shearing and phase-shifting point diffraction interferometer38US 6,573,997 B1The Regents of California · 2003
- Interferometric cyclic error compensation34US 6,806,961 B2Zygo Corporation · 2004