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US 12,345,653 B2Granted
Defect inspection apparatus
AssigneeShimadzu Corporation
InventorsHiroshi Horikawa, Kenji Takubo
Life of this patent
Estimating the term…
Abstract
This defect inspection apparatus (100) is provided with an excitation unit (1), a laser illumination unit (2), an interference unit (30), an imaging unit (31), a holding member (4) for holding the imaging unit at a position spaced apart from an inspection target (90) by a predetermined distance, a connecting member (5) for connecting the holding member or the imaging unit and the excitation unit, and a controller (6) for generating an image (61) related to the propagation of an elastic wave on an inspection target.
Claims25
A defect inspection apparatus comprising:
- an excitation unit configured to excite an elastic wave in an inspection target;
- a laser illumination unit configured to irradiate the inspection target with laser light;
- an interference unit configured to cause the laser light reflected from mutually different positions of the inspection target excited by the excitation unit to interfere;
- an imaging unit configured to image interfered laser light;
- a holding member configured to hold the imaging unit at a position spaced apart from the inspection target by a predetermined distance;
- a connecting member configured to connect the holding member or the imaging unit and the excitation unit;
- a controller configured to generate an image related to propagation of the elastic wave of the inspection target, based on the interfered laser light imaged by the imaging unit, and
- a vibration absorbing member provided between the excitation unit and the imaging unit, the vibration absorbing member being configured to absorb vibrations from the excitation unit.
5 more elements
A defect inspection apparatus comprising:
- an excitation unit configured to excite an elastic wave in an inspection target;
- a laser illumination unit configured to irradiate the inspection target with laser light;
- an interference unit configured to cause the laser light reflected from mutually different positions of the inspection target excited by the excitation unit to interfere;
- an imaging unit configured to image interfered laser light;
- a holding member configured to hold the imaging unit at a position spaced apart from the inspection target by a predetermined distance so that the imaging unit does not change from a predetermined distance from the inspection target;
- a connecting member configured to connect the holding member or the imaging unit and the excitation unit;
- a controller configured to generate an image related to propagation of the elastic wave of the inspection target, based on the interfered laser light imaged by the imaging unit, and
- a vibration absorbing member provided between the excitation unit and the imaging unit, the vibration absorbing member being configured to absorb vibrations from the excitation unit.
5 more elements
A defect inspection apparatus comprising:
- an excitation unit configured to excite an elastic wave in an inspection target;
- a laser illumination unit configured to irradiate the inspection target with laser light;
- an interference unit configured to cause the laser light reflected from mutually different positions of the inspection target excited by the excitation unit to interfere;
- an imaging unit configured to image interfered laser light;
- a holding member including an imaging unit holding part for holding the imaging unit and a plurality of legs provided on the imaging unit holding part, and configured to hold the imaging unit at a position spaced apart from the inspection target by a predetermined distance;
- a connecting member configured to connect the holding member or the imaging unit and the excitation unit;
- a controller configured to generate an image related to propagation of the elastic wave of the inspection target, based on the interfered laser light imaged by the imaging unit, and
- a vibration absorbing member provided between the excitation unit and the imaging unit, the vibration absorbing member being configured to absorb vibrations from the excitation unit.
5 more elements
A defect inspection apparatus comprising:
- an excitation unit configured to excite an elastic wave in an inspection target;
- a laser illumination unit configured to irradiate the inspection target with laser light;
- an interference unit configured to cause the laser light reflected from mutually different positions of the inspection target excited by the excitation unit to interfere;
- an imaging unit configured to image interfered laser light;
- a holding member configured to hold the imaging unit at a position spaced apart from the inspection target by a predetermined distance;
- a connecting member configured to connect the holding member or the imaging unit and the excitation unit;
- a controller configured to generate an image related to propagation of the elastic wave of the inspection target, based on the interfered laser light imaged by the imaging unit, and
- a vibration absorbing member configured to absorb vibrations from the excitation unit and bias the excitation unit so as to come into close contact with the inspection target.
5 more elements
Dependencies are inferred from the claim text.