G01B 11/2441
Using interferometry
Official title: {using interferometry}
G01B11/2441 (Using interferometry) appears on 962 US grants and 990 published applications in this corpus.
Search patents in G01B- Granted patents
- 962
- Published applications
- 990
- Assignees
- 470
- Inventors
- 1,859
- Latest grant
- 15 Sep 2026
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1976 | 2 | 0 |
| 1977 | 0 | 0 |
| 1978 | 2 | 0 |
| 1979 | 1 | 0 |
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 2 | 0 |
| 1983 | 4 | 0 |
| 1984 | 3 | 0 |
| 1985 | 1 | 0 |
| 1986 | 2 | 0 |
| 1987 | 2 | 0 |
| 1988 | 4 | 0 |
| 1989 | 3 | 0 |
| 1990 | 4 | 0 |
| 1991 | 2 | 0 |
| 1992 | 4 | 0 |
| 1993 | 6 | 0 |
| 1994 | 8 | 0 |
| 1995 | 15 | 0 |
| 1996 | 7 | 0 |
| 1997 | 3 | 0 |
| 1998 | 9 | 0 |
| 1999 | 25 | 0 |
| 2000 | 13 | 0 |
| 2001 | 15 | 8 |
| 2002 | 15 | 18 |
| 2003 | 9 | 34 |
| 2004 | 23 | 29 |
| 2005 | 25 | 28 |
| 2006 | 31 | 43 |
| 2007 | 30 | 30 |
| 2008 | 37 | 31 |
| 2009 | 33 | 33 |
| 2010 | 32 | 44 |
| 2011 | 27 | 35 |
| 2012 | 25 | 51 |
| 2013 | 35 | 31 |
| 2014 | 35 | 29 |
| 2015 | 32 | 44 |
| 2016 | 28 | 35 |
| 2017 | 39 | 49 |
| 2018 | 48 | 49 |
| 2019 | 53 | 54 |
| 2020 | 52 | 39 |
| 2021 | 39 | 57 |
| 2022 | 44 | 49 |
| 2023 | 21 | 42 |
| 2024 | 36 | 43 |
| 2025 | 49 | 43 |
| 2026 | 26 | 42 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Measurement device for interferometric measurement of a surface shape15 Sep 2026US 12,736,331 B2Carl Zeiss SMT GmbH
- Three-dimensional shape measuring device, reference surface position adjustment method therefor, and measurement mode switching method therefor8 Sep 2026US 12,729,949 B2Tokyo Seimitsu Co., Ltd.
- Widely tunable frequency doubled light source1 Sep 2026US 12,724,320 B1Thorlabs, Inc.
- Measurement method, shaping device, simulator, measurement device, and storage medium25 Aug 2026US 12,716,714 B2Canon Kabushiki Kaisha
- Meta-surface characterization18 Aug 2026US 12,710,266 B1BlueHalo, LLC
- Shape measurement system, processing apparatus, shape measurement method, processing method, and chip manufacturing method1 Oct 2026US 2026/0298616 A1Disco Corporation
- Measuring apparatus and method for controlling measuring apparatus1 Oct 2026US 2026/0298620 A1Lasertec Corporation
- System and method for transparent layer compensation in 3d optical metrology24 Sep 2026US 2026/0287334 A1Orbotech Ltd.
- Three-dimensional shape measuring device, reference surface position adjustment method therefor, and measurement mode switching method therefor17 Sep 2026US 2026/0276364 A1Tokyo Seimitsu Co., Ltd.
- Optical measurement system and optical measurement method10 Sep 2026US 2026/0266597 A1Otsuka Electronics Co., Ltd.
Most cited
By later US patents
- Method and apparatus for optical imaging with means for controlling the longitudinal range of the sample1,199US 5,321,501 AMassachusetts Institute of Technology · 1994
- Methods and apparatus for forward-directed optical scanning instruments1,184US 6,485,413 B1The General Hospital Corporation · 2002
- Method and apparatus for performing optical measurements using a fiber optic imaging guidewire, catheter or endoscope1,079US 6,134,003 AMassachusetts Institute of Technology · 2000
- Method and apparatus for performing optical measurements1,018US 5,459,570 AMassachusetts Institute of Technology · 1995
- Fiber optic needle probes for optical coherence tomography imaging722US 6,564,087 B1Massachusetts Institute of Technology · 2003