Optical measurement system and optical measurement method
AssigneeOtsuka Electronics Co., Ltd.
InventorsKensaku SHIMODA, Naoto TAKAHASHI
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Abstract
An optical measurement system includes a light source, an optical system that illuminates a sample with light from the light source and records a wavefront of reflection light from the sample, and a processing unit that calculates a surface topography of the sample based on information on the wavefront of reflection light. An angle of incidence of the light illuminating the sample is set based on a complex amplitude reflection coefficient based on light reflected at a surface of the sample and a complex amplitude reflection coefficient based on light reflected at a portion other than the surface of the sample.
Claims20
An optical measurement system comprising:
- a light source;
- an optical system configured to illuminate a sample with light from the light source and to record a wavefront of reflection light from the sample;
- and
- a processing unit configured to calculate a surface topography of the sample based on information on the wavefront of the reflection light, wherein
- an angle of incidence of the light illuminating the sample is set based on a complex amplitude reflection coefficient based on light reflected at a surface of the sample and a complex amplitude reflection coefficient based on light reflected at a portion other than the surface of the sample.
An optical measurement system comprising:
- a light source;
- an optical system configured to illuminate a sample with light from the light source and to record a wavefront of reflection light from the sample;
- and
- a processing unit configured to calculate a surface topography of the sample based on information on the wavefront of the reflection light, wherein
- an angle of incidence of the light illuminating the sample is set to exceed an arccosine of a value calculated by dividing a half wavelength of light from the light source by an amount of variation of the surface topography of the sample.
An optical measurement method comprising:
- illuminating a sample with light from a light source;
- recording a wavefront of reflection light from the sample;
- and
- calculating a surface topography of the sample based on information on the wavefront of the reflection light, wherein
- an angle of incidence of the light illuminating the sample is set based on a complex amplitude reflection coefficient based on light reflected at a surface of the sample and a complex amplitude reflection coefficient based on light reflected at a portion other than the surface of the sample.
Dependencies are inferred from the claim text.