US 2026/0298620 A1Published application

Measuring apparatus and method for controlling measuring apparatus

AssigneeLasertec Corporation

InventorsYoshihiro NISHIMURA, Shoichi SHIMODA

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Abstract

A measuring apparatus includes: a phase shifting mechanism configured to generate a plurality of optical path differences between a first optical path and a second optical path; and a standard tilt acquisition unit configured to acquire a standard tilt of the sample, wherein: the photodetector is configured to detect the interference light at the plurality of optical path differences; and the standard tilt acquisition unit is configured to: acquire height information at a plurality of measurement points on the sample based on a result of the detection of the interference light at the plurality of optical path differences; acquire tilt information between measurement points based on the height information at the plurality of measurement points; and acquire the standard tilt based on statistical processing performed for a plurality of pieces of tilt information.

Claims16

Dependent claims

A measuring apparatus comprising:

an optical system comprising a photo-detection unit, a separation part configured to separate illumination light emitted from a light source, and a reference surface, and configured to guide interference light caused by reflected light of sample illumination light reflected on a sample and reference light of reference illumination light reflected on the reference surface to the photo-detection unit, the sample illumination light being light originally traveling through the separation part toward the sample, and the reference illumination light being light originally traveling through the separation part toward the reference surface;
a phase shifting mechanism configured to generate a plurality of optical path differences between a first optical path and a second optical path, the first optical path including at least one of an optical path of the sample illumination light and an optical path of the reflected light, and the second optical path including at least one of an optical path of the reference illumination light and an optical path of the reference light;
and
a standard tilt acquisition unit configured to acquire a standard tilt of the sample,
wherein the photo-detection unit is configured to detect the interference light at the plurality of optical path differences, and
wherein the standard tilt acquisition unit is configured to:
acquire height information at a plurality of measurement points on the sample based on a result of the detection of the interference light at the plurality of optical path differences;
acquire tilt information between measurement points based on the height information at the plurality of measurement points;
and
acquire the standard tilt based on statistical processing performed for a plurality of pieces of tilt information.

7 more elements

A method for controlling a measuring apparatus, the measuring apparatus comprising:

an optical system comprising a photo-detection unit, a separation part configured to separate illumination light emitted from a light source, and a reference surface, and configured to guide interference light caused by reflected light of sample illumination light reflected on a sample and reference light of reference illumination light reflected on the reference surface to the photo-detection unit, the sample illumination light being light originally traveling through the separation part toward the sample, and the reference illumination light being light originally traveling through the separation part toward the reference surface;
and
a phase shifting mechanism configured to generate a plurality of optical path differences between a first optical path and a second optical path, the first optical path including at least one of an optical path of the sample illumination light and an optical path of the reflected light, and the second optical path including at least one of an optical path of the reference illumination light and an optical path of the reference light;
the method comprising:
generating, by controlling the phase shifting mechanism, the plurality of optical path differences between the first and second optical paths;
making the photo-detection unit detect the interference light at the plurality of optical path differences;
and
acquiring a standard tilt of the sample based on a result of the detection by the photo-detection unit,
wherein the acquiring of the standard tilt of the sample includes:
acquiring height information at a plurality of measurement points on the sample based on a result of the detection of the interference light at the plurality of optical path differences;
acquiring tilt information between measurement points based on the height information at the plurality of measurement points;
and
acquiring the standard tilt based on statistical processing performed for a plurality of pieces of tilt information.

10 more elements

Dependencies are inferred from the claim text.