Measurement method, shaping device, simulator, measurement device, and storage medium
AssigneeCanon Kabushiki Kaisha
InventorYoshihiro Shiode
Life of this patent
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Abstract
A measurement method of measuring deflection of a mold by measuring Newton's rings obtained by pressing the mold on a substrate with a resist interposed therebetween and irradiating the substrate with light via the mold includes: performing the pressing through the resist having a height less than an optical distance λ/4, λ being a wavelength of the light; measuring peak positions of the Newton's rings in a contact boundary portion between the mold and the substrate in a region in which a gap between the mold and the substrate is less than the optical distance λ/4; and calculating the deflection of the mold based on the peak positions.
Claims14
A measurement method of measuring deflection of a mold by measuring Newton's rings obtained by pressing the mold on a substrate with a resist interposed therebetween and irradiating the substrate with light via the mold, the measurement method comprising:
- performing the pressing through the resist having a height less than an optical distance λ/4, λ being a wavelength of the light;
- measuring peak positions of the Newton's rings in a contact boundary portion between the mold and the substrate in a region in which a gap between the mold and the substrate is less than the optical distance λ/4;
- and
- calculating the deflection of the mold based on the peak positions.
A measurement device that measures deflection of a mold by measuring Newton's rings obtained by pressing the mold on a substrate with a resist interposed therebetween and irradiating the substrate with light via the mold, the measurement device comprising:
- an imprint head configured to perform the pressing through the resist having a height less than an optical distance λ/4, λ being a wavelength of the light;
- at least one processor or circuit configured to:
- measure peak positions of the Newton's rings in a contact boundary portion between the mold and the substrate in a region in which a gap between the mold and the substrate is less than the optical distance λ/4;
- and
- calculate the deflection of the mold based on the peak positions.
A non-transitory computer-readable storage medium configured to store a computer program comprising instructions for executing following processes:
- in order to measure deflection of a mold by measuring Newton's rings obtained by pressing the mold on a substrate with a resist interposed therebetween and irradiating the substrate with light via the mold,
- performing the pressing through the resist having a height less than an optical distance λ/4, λ being a wavelength of the light;
- measuring peak positions of the Newton's rings in a contact boundary portion between the mold and the substrate in a region in which a gap between the mold and the substrate is less than the optical distance λ/4;
- and
- calculating the deflection of the mold based on the peak positions.
Dependencies are inferred from the claim text.