F17C 2221/05
Ultrapure fluid
F17C2221/05 (Ultrapure fluid) appears on 107 US grants and 67 published applications in this corpus.
Search patents in F17C- Granted patents
- 107
- Published applications
- 67
- Assignees
- 60
- Inventors
- 230
- Latest grant
- 10 Sep 2024
Filings by year
| Year | Granted patents | Published applications |
|---|---|---|
| 1980 | 1 | 0 |
| 1981 | 0 | 0 |
| 1982 | 0 | 0 |
| 1983 | 0 | 0 |
| 1984 | 0 | 0 |
| 1985 | 0 | 0 |
| 1986 | 0 | 0 |
| 1987 | 1 | 0 |
| 1988 | 1 | 0 |
| 1989 | 3 | 0 |
| 1990 | 3 | 0 |
| 1991 | 1 | 0 |
| 1992 | 3 | 0 |
| 1993 | 1 | 0 |
| 1994 | 1 | 0 |
| 1995 | 4 | 0 |
| 1996 | 2 | 0 |
| 1997 | 6 | 0 |
| 1998 | 4 | 0 |
| 1999 | 10 | 0 |
| 2000 | 7 | 0 |
| 2001 | 2 | 0 |
| 2002 | 9 | 5 |
| 2003 | 8 | 11 |
| 2004 | 2 | 6 |
| 2005 | 6 | 10 |
| 2006 | 4 | 3 |
| 2007 | 8 | 8 |
| 2008 | 3 | 1 |
| 2009 | 1 | 2 |
| 2010 | 2 | 4 |
| 2011 | 0 | 2 |
| 2012 | 0 | 0 |
| 2013 | 2 | 0 |
| 2014 | 0 | 1 |
| 2015 | 2 | 0 |
| 2016 | 0 | 2 |
| 2017 | 1 | 0 |
| 2018 | 0 | 3 |
| 2019 | 3 | 3 |
| 2020 | 3 | 2 |
| 2021 | 1 | 1 |
| 2022 | 1 | 1 |
| 2023 | 0 | 0 |
| 2024 | 1 | 0 |
| 2025 | 0 | 0 |
| 2026 | 0 | 2 |
By publication year. Applications have been published since 2001. 2026 runs to 8 Oct.
Recent patents
- Vacuum supply gas cylinder10 Sep 2024US 12,085,230 B2
- Method for manufacturing filled container, and filled container6 Dec 2022US 11,519,557 B2Central Glass Company, Limited
- Gas storage cylinder, deposition system, and method of manufacturing semiconductor device5 Jan 2021US 10,883,173 B2Samsung Electronics Co., Ltd.
- Liquefied-fluid storage tank22 Sep 2020US 10,781,975 B2L Air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation des Procedes Georges Claude
- Gas container23 Jun 2020US 10,689,756 B2Linde Aktiengesellschaft
- Method for cleaning high-pressure gas container17 Sep 2026US 2026/0273593 A1Resonac Corporation
- Method for cleaning high-pressure gas container17 Sep 2026US 2026/0273594 A1Resonac Corporation
- Sulfur dioxide mixture, and method of producing the same, and filling container11 Aug 2022US 2022/0250908 A1Showa Denko K. K.
- Vacuum supply gas cylinder11 Feb 2021US 2021/0041068 A1
- Gas supply method and gas supply system3 Sep 2020US 2020/0278084 A1Tokyo Electron Limited
Most cited
By later US patents
- Apparatus for supplying high purity fluid77US 5,409,526 AAir Products and Chemicals, Inc. · 1995
- Manifold systems for high purity chemical delivery systems75US 5,590,695 AAdvanced Delivery & Chemical Systems, Ltd. · 1997
- Fluid distribution system and process, and semiconductor fabrication facility utilizing same63US 6,561,213 B2Advanced Technology Materials, Inc. · 2003
- Bulk containers for high purity chemical delivery systems59US 5,562,132 AAdvanced Delivery & Chemical Systems, Ltd. · 1996
- Level control systems for high purity chemical delivery systems53US 5,711,354 AAdvanced Delivery & Chemical Systems, Ltd. · 1998