Fluid distribution system and process, and semiconductor fabrication facility utilizing same

A low pressure compressed liquefied gas supply system, for supply of corresponding gas to a point-of-use gas-consuming unit, said system comprising:

• a main liquid supply vessel;
• a local supply vessel, containing a physical sorbent having affinity for gas deriving from said liquefied gas, and wherein said sorbent retains impurities from said fluid;
• first flow circuitry interconnecting the main liquid supply vessel and the local supply vessel, a sub-atmospheric pressure regulator in at least one of said first flow circuitry and said main liquid supply vessel, so that gas deriving from said liquefied gas is flowed into the local supply vessel at sub-atmospheric pressure, and wherein the first flow circuitry is coupled with a condensation suppression unit, arranged and operated to prevent condensation in gas flowed into the local supply vessel.;
• and
• second flow circuitry coupling the local supply vessel with said point-of-use gas-consuming unit, arranged so that gas is dispensed from the local supply vessel through the second flow circuitry to the point-of-use gas-consuming unit.