Gas supply method and gas supply system
AssigneeTokyo Electron Limited
InventorsYukimasa SAITO, Naohiro FURUYA, Shinichi KAWAGUCHI
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Abstract
There is provide a gas supply method including: preparing a gas container filled with an easy-to-liquefy gas; and supplying the easy-to-liquefy gas from the gas container to a processing container in which a substrate process is performed using the easy-to-liquefy gas, via a gas supply path, wherein a pressure and a temperature of the easy-to-liquefy gas are controlled such that in the gas supply path, the pressure of the easy-to-liquefy gas decreases in a step-by-step manner and the temperature of the easy-to-liquefy gas increases from the gas container toward the processing container.
Claims16
A gas supply method comprising:
- preparing a gas container filled with an easy-to-liquefy gas;
- and
- supplying the easy-to-liquefy gas from the gas container to a processing container in which a substrate process is performed using the easy-to-liquefy gas, via a gas supply path,
- wherein a pressure and a temperature of the easy-to-liquefy gas are controlled such that in the gas supply path, the pressure of the easy-to-liquefy gas decreases in a step-by-step manner and the temperature of the easy-to-liquefy gas increases from the gas container toward the processing container.
A gas supply system comprising:
- a gas container filled with an easy-to-liquefy gas;
- a gas supply path through which the easy-to-liquefy gas is supplied from the gas container to a processing container in which a substrate process is performed using the easy-to-liquefy gas;
- a plurality of regulators provided in the gas supply path,
- a plurality of heater units configured to heat a plurality of heating regions obtained by dividing the gas container and the gas supply path into plural regions;
- a controller configured to control the plurality of regulators and the plurality of heater units such that in the gas supply path, a pressure of the easy-to-liquefy gas decreases in a step-by-step manner and a temperature of the easy-to-liquefy gas increases from the gas container toward the processing container.
Dependencies are inferred from the claim text.