Bulk containers for high purity chemical delivery systems
AssigneeAdvanced Delivery & Chemical Systems, Ltd.
InventorsStephen H. Siegele, Craig M. Noah, John N. Gregg
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Abstract
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Claims12
A canister for a chemical delivery system for high purity chemicals comprising a metallic container comprising an inlet and an outlet;
- a normally closed inlet pneumatic valve integral with said inlet, said inlet pneumatic valve comprising an inlet port, said inlet port having an attachment means for removably attaching said inlet port to a chemical delivery system;
- a normally closed outlet pneumatic valve integral with said outlet;
- and, a level sensor disposed in said metallic container and having a low level trigger point;
- said level control sensor comprising a cable for providing a low level signal to a low level indicator circuit to indicate the level of the high purity chemical in said container, said outlet further comprising a metallic tube disposed in said container extending from said integral outlet pneumatic valve to a point below said low level sensor trigger point.
A high purity chemical delivery system comprising a metallic bulk container comprising an inlet and an outlet;
- a normally closed pneumatic valve interconnected with said inlet and comprising a metallic inlet port, said inlet port removably attached to a carrier gas inlet line of a high purity chemical delivery system manifold;
- a normally closed pneumatic valve interconnected with said outlet and comprising a metallic outlet port, said metallic outlet port removably attached to a bulk container outlet line of a high purity chemical delivery system manifold;
- a level control sensor removably attached to an opening in said metallic bulk container;
- said level control sensor comprising multiple trigger points for providing signals indicating the level of the high purity chemical in said bulk container wherein at least one of said trigger points generates a low level signal indicative of the level in said bulk container at which the bulk container should be replaced, said low level signal is communicated to a low level circuit;
- and a metallic tube disposed in said bulk container and extending from said pneumatic outlet valve to a point below said trigger point which generates said low level signal.
Dependencies are inferred from the claim text.