Loading patent…
AssigneeAir Products and Chemicals, Inc.
InventorsDao-Hong Zheng, John Irven, Alan J. F. Paterson, Daniel C. Tregear
Estimating the term…
An apparatus for supplying high purity gas comprises a cylinder having a valve with two internal ports. One internal port is used to fill the cylinder while the other is fitted with a unit which removes particulates and impurities from the gas as it leaves the cylinder. The unit comprises an inlet, a first filter for removing coarse particulates, layers of adsorbent and absorbent for removing impurities, and a second filter for removing fine particulates. The purified gas leaves the cylinder via the valve and after passing through a regulator, a flow control device and various lengths of tubing passes through a conventional purifier immediately upstream of the point of use. The apparatus reduces the load on the purifier and hence decreases the frequency at which the purifier has to be recharged. Potentially the apparatus could obviate the need for the purifier altogether.
An apparatus for supplying high purity fluid, which apparatus comprises a cylinder having a valve, said valve adapted to close said cylinder and having means for filling and removing fluid from said cylinder via two internal ports connected to said means for filling and removing of fluid, and a unit connected to one of said ports said unit containing a substance selected from the group consisting of adsorbents, absorbents and mixtures thereof, whereby impurities are removed from said fluid as it is withdrawn from said cylinder through said unit.
Dependencies are inferred from the claim text.